Stability detection method for thermal control focusing mechanism
A detection method and stability technology, applied in the field of stability detection of thermal control focusing mechanism, can solve the problems of image quality influence and lack of detection method, etc.
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[0031] (1) The first reflector 2 can be a secondary mirror or a plane mirror, but the secondary mirror is generally spherical or aspheric, which is not easy to measure, so the first reflector 2 is preferably a plane mirror.
[0032] (2) The standard mirror 3 is a transmission standard mirror, which also reflects while transmitting, and the reflection of the transmission standard mirror interferes with the reflection of the first reflection mirror 2 .
[0033] (3) The interferometer can be a zygo interferometer or an interferometer of other brands.
[0034] (4) By adjusting the first reflector 2, the interference fringes are minimized or disappeared, which is related to the surface shape of the first reflector 2. The surface shape of the first reflector 2 is very good, and there may be no fringes , if the surface shape of the first mirror 2 is not good, there may be ring fringes. In practical applications, the entire structure of the focus ring 1 can be placed on the five-dime...
Embodiment 1
[0047] Such as figure 1 As shown, a method for detecting the stability of a thermally controlled focusing mechanism includes the following steps:
[0048] Step A1, use the secondary mirror installed on the focusing ring 1 in the thermal control focusing mechanism as the first reflector 2, and set the standard mirror 3 and the interferometer in sequence on the same optical axis as the incident light direction of the first reflector 2 4. The parallel monochromatic light emitted by the interferometer 4 is reflected by the standard mirror 3 to form a reference light, and interferes with the reference light after being reflected by the first reflector 2 to form interference fringes; by adjusting the The first mirror 2 minimizes or eliminates the interference fringes. At this time, the temperature of the thermal control focusing mechanism is 20°C. Record this temperature as the initial temperature. At this time, the interference fringes observed from the field of view of the interfe...
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