The invention discloses a multi-channel multi-phase
clock array based on an MEMS, and belongs to the field of
radio frequency integration. Comprising a
clock source circuit for generating reference signals of a multi-path multi-phase
clock; the multi-phase clock generation circuit takes the reference
signal output by the clock source circuit as an input
signal, N paths of clocks are generated by using a
delay phase-locked loop structure, and the
phase difference of each path of clock is 2pi / N; according to the multi-phase clock calibration circuit, the multi-channel clocks of the multi-phase clock generation circuit are used as input signals of a controllable
delay line array in the multi-phase clock calibration circuit, and after the multi-channel clocks output by the controllable
delay line array are used for driving the multi-channel ADCs to sample the same sinusoidal
signal, the same sinusoidal signal is output. A three-point IpDFT phase
estimation algorithm is used for estimating the sampled sinusoidal signals to obtain the
phase difference of multiple paths of clocks, and the delay of each path of the controllable delay
line array is controlled according to the
phase difference so as to calibrate the
clock phase. Compared with a traditional multi-path and multi-phase clock structure, the multi-path and multi-phase clock structure has higher integration level, and the three-point IpDFT phase
estimation algorithm is adopted, so that very high phase precision is achieved.