Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Temperature measuring device of substrate

A temperature measurement and substrate technology, which is applied in the direction of measuring devices, thermometers, heat measurement, etc., can solve the problems of poor temperature measurement effect of silicon substrates, and achieve the effect of solving poor temperature measurement effect, realizing accurate measurement, and facilitating precise control

Pending Publication Date: 2019-02-26
深圳网联光仪科技有限公司
View PDF0 Cites 2 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] A substrate temperature measurement device proposed by the present invention aims to solve the problem of poor temperature measurement effect of silicon substrates in the prior art

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Temperature measuring device of substrate
  • Temperature measuring device of substrate
  • Temperature measuring device of substrate

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0024] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

[0025] The implementation of the present invention will be described in detail below in conjunction with specific embodiments.

[0026] In the drawings of this embodiment, the same or similar symbols correspond to the same or similar components; The indicated orientation or positional relationship is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred device or element must have a specific orientation, or in a specific orien...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention relates to the technical field of a temperature measuring device, which discloses a temperature measuring device of a substrate. The temperature measuring device is characterized by comprising a fluorescent film coating the surface of a substrate, a laser emitter, a photoelectric detector, a signal processor and a temperature converter; the laser emitter is used for emitting laser light to the fluorescent film to excite fluorescence of the fluorescent film; the photoelectric detector is used for receiving the fluorescence and converting a fluorescence signal emitted from the fluorescence into an electrical signal; the signal processor is used for calculating the electrical signal to obtain the lifetime of the fluorescence; the temperature converter is used for converting themeasured lifetime of the fluorescence into a corresponding temperature. Through the processing and calculation of the photoelectric detector and the signal processor, the fluorescence lifetime excitedby the fluorescent thin film irradiated by laser can be obtained, and then the temperature of the corresponding substrate position can be obtained, so that the substrate temperature can be accuratelymeasured and the temperature can be accurately controlled.

Description

technical field [0001] The invention relates to the technical field of temperature measuring devices, in particular to a substrate temperature measuring device. Background technique [0002] Temperature measurement is a quantitative measurement of the temperature of an object with a temperature measuring instrument. No matter in the industrial processing process or in daily life, it is necessary to measure the temperature, and it has basically been used in various industries. [0003] With the improvement of integrated circuit integration, 7nm processing technology has been applied, and the technology with smaller line width is also being developed, which puts forward higher requirements for the process parameters of integrated circuit production, especially the production equipment cavity. For substrate temperature parameters, due to the many limitations of contact temperature measurement, non-contact temperature measurement is generally used. [0004] At present, in the m...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): G01K11/12
CPCG01K11/12
Inventor 夏国强李浩文
Owner 深圳网联光仪科技有限公司
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com