Piezoelectric actuation deformable mirror for synchrotron radiation light source and assembling method thereof

A piezoelectric drive and piezoelectric drive technology, applied in optics, optical components, instruments, etc., can solve the problems of unstable mirror deformation, limited deformation ability, and reduced beam focusing performance, achieving simple and convenient assembly and changing the deformation stroke , Improve the effect of focusing performance

Active Publication Date: 2019-03-01
NAT UNIV OF DEFENSE TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

If it is fixed with screws or adhesives, its deformation ability is greatly limited
However, if the clamping is not p

Method used

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  • Piezoelectric actuation deformable mirror for synchrotron radiation light source and assembling method thereof
  • Piezoelectric actuation deformable mirror for synchrotron radiation light source and assembling method thereof
  • Piezoelectric actuation deformable mirror for synchrotron radiation light source and assembling method thereof

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Embodiment Construction

[0037] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0038] Figure 1 to Figure 7 Shows the piezoelectrically driven deformable mirror used for synchrotron radiation light sources in this embodiment, including a base 1, a piezoelectric driver 2, a reflector 3, an electrical connector 4 and an adjustable flexible clamp 5, and the flexible clamp 5 is fixed on the On the base 1, the flexible clamp 5 can adjust the tightness to clamp the piezoelectric actuator 2, the mirror 3 is bonded to the side of the piezoelectric actuator 2 away from the flexible clamp 5, and the electrical connection part 4 is installed on the base 1 and connected to the piezoelectric actuator. 2 electrical connections. In this structure, both the piezoelectric actuator 2 and the reflector 3 are in a square shape, and the flexible clamp 5 is fixed on the base 1 by fixing bolts 7. The flexible clamp 5 can also be fixe...

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Abstract

A piezoelectric actuation deformable mirror for a synchrotron radiation light source comprises a pedestal, a piezoelectric actuator, a reflection mirror, an electricity connection piece and an adjustable flexible clamp fixedly installed on the pedestal, the flexible clamp is provided with a clamping piezoelectric actuator capable of regulating tightness, the reflection mirror is spliced at one surface, far away from the flexible clamp, of the piezoelectric actuator, and the electricity connection piece is arranged on the pedestal and is electrically connected with the piezoelectric actuator. The assembling method comprises the steps of: S1: installing a ground electrode and a drive electrode on the piezoelectric actuator; S2: splicing the reflection mirror and the piezoelectric actuator toform a layer structure part; S3: fixedly installing the flexible clamp on the pedestal; S4: allowing the piezoelectric actuator to be electrically connected with the electricity connection piece, andinstalling the electricity connection piece to the pedestal; S5: installing the piezoelectric actuator of the layer structure part on the flexible clamp; and S6: communicating the electricity connection piece to a power source. The deformable mirror is simple in structure, convenient in manufacturing and installation and stable in deformation and can achieve curvature regulation to meet differentfocusing requirements, and the assembling method is simple and convenient.

Description

technical field [0001] The invention relates to the technical field of optical devices, in particular to a piezoelectrically driven deformable mirror used for a synchrotron radiation light source and an assembly method thereof, which can realize adjustable curvature and meet requirements of different focusing conditions. Background technique [0002] In 1994, the European Synchrotron Radiation Facility (ESRF) prepared the world's first single-electrode transverse piezoelectric deformable mirror, which controlled the curvature of the mirror surface by changing the driving voltage, and studied the wavefront detection technology and feedback applicable to the X-ray field. The control algorithm finally proved the feasibility of deformable mirrors in synchrotron radiation through experiments. Since then, the British Diamond Synchrotron Radiation Light Source (Diamond) and Japan's Large-scale Synchrotron Radiation Light Source (Spring-8) have conducted research on the structural d...

Claims

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Application Information

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IPC IPC(8): G02B26/08
CPCG02B26/0816
Inventor 戴一帆关朝亮铁贵鹏范占斌
Owner NAT UNIV OF DEFENSE TECH
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