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Digital micro-fluidic substrate, manufacturing method thereof and digital micro-fluidic chip and method

A digital microfluidic and substrate technology, applied in the field of microfluidics, can solve problems such as low accuracy and achieve the effect of accurate temperature monitoring

Active Publication Date: 2019-03-05
BOE TECH GRP CO LTD +1
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In order to overcome the problem in the related art that temperature sensors such as thermocouples are used to detect the temperature of a digital microfluidic chip with low accuracy, the present invention provides a digital microfluidic substrate and a manufacturing method thereof, a digital microfluidic chip and a digital microfluidic chip. method

Method used

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  • Digital micro-fluidic substrate, manufacturing method thereof and digital micro-fluidic chip and method
  • Digital micro-fluidic substrate, manufacturing method thereof and digital micro-fluidic chip and method
  • Digital micro-fluidic substrate, manufacturing method thereof and digital micro-fluidic chip and method

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Embodiment Construction

[0048] The specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0049]figure 1 A schematic diagram of the hierarchical structure of a digital microfluidic substrate provided by an embodiment of the present invention. Such as figure 1 As shown, the digital microfluidic substrate includes a base substrate 11 , and a droplet control unit 13 and a temperature detection unit disposed on the base substrate 11 . The droplet control unit 13 includes an electrode layer 131 , a dielectric layer 132 and a hydrophobic layer 133 sequentially disposed on the substrate 11 . The electrode layer 131 includes a plurality of control electrodes 134 . The temperature detection unit includes a plurality of temperature sensors 12 . A plurality of tempera...

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Abstract

The invention discloses a digital micro-fluidic substrate, a manufacturing method thereof and a digital micro-fluidic chip and method, and belongs to the technical field of micro-fluidic control. Thedigital micro-fluidic substrate comprises a substrate base plate, a liquid drop control unit and a temperature detection unit, wherein the liquid drop control unit and the temperature detection unit are arranged on the substrate base plate; the liquid drop control unit comprises an electrode layer, a dielectric layer and a hydrophobic layer which are arranged on the substrate base plate in sequence, wherein the electrode layer comprises a plurality of control electrodes; the temperature detection unit comprises a plurality of temperature sensors; the plurality of temperature sensors and the plurality of control electrodes are arranged in a one-to-one correspondence mode; and each group of corresponding temperature sensors and control electrodes are arranged perpendicularly to the substratein an overlapped mode.

Description

technical field [0001] The invention relates to the field of microfluidic technology, in particular to a digital microfluidic substrate and a manufacturing method thereof, a digital microfluidic chip and a method thereof. Background technique [0002] Digital microfluidics is a fluid control technology that uses independent droplets as control units. This technology can accurately control the movement of droplets, realize the fusion and separation of droplets, and complete various biochemical reactions. A common digital microfluidic chip drives the liquid to move in a specified direction by applying a voltage to the control electrodes. [0003] For some biochemical reactions that are sensitive to temperature changes or require temperature control, it is necessary to monitor the temperature of the biochemical reaction. At present, the environmental temperature monitoring of the biochemical reaction on the digital microfluidic chip is realized by directly pasting and fixing ...

Claims

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Application Information

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IPC IPC(8): B01L3/00
CPCB01L3/5027B01L3/502707B01L2300/18B01L2300/0645B01L3/502792B01L2200/12B01L2200/147B01L2300/165B01L2400/0427G01K1/026B01L2200/027B01L2300/1827B01L2400/0415B01L2400/082
Inventor 耿越蔡佩芝庞凤春古乐车春城薛海林邵喜斌
Owner BOE TECH GRP CO LTD
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