Digital micro-fluidic substrate, manufacturing method thereof and digital micro-fluidic chip and method
A digital microfluidic and substrate technology, applied in the field of microfluidics, can solve problems such as low accuracy and achieve the effect of accurate temperature monitoring
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[0048] The specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.
[0049]figure 1 A schematic diagram of the hierarchical structure of a digital microfluidic substrate provided by an embodiment of the present invention. Such as figure 1 As shown, the digital microfluidic substrate includes a base substrate 11 , and a droplet control unit 13 and a temperature detection unit disposed on the base substrate 11 . The droplet control unit 13 includes an electrode layer 131 , a dielectric layer 132 and a hydrophobic layer 133 sequentially disposed on the substrate 11 . The electrode layer 131 includes a plurality of control electrodes 134 . The temperature detection unit includes a plurality of temperature sensors 12 . A plurality of tempera...
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