Ion Source Circumferential Spoke Oscillation Remote Measurement System and Measurement Method
A measurement system and ion source technology, which are applied in the field of ion source circumferential spoke oscillation long-distance measurement systems, can solve the problems of inaccurate measurement results, unfavorable measurement spoke oscillation characteristics, inability to monitor circumferential channels, etc., so as to solve the problem of interference. Effect
Active Publication Date: 2021-05-28
哈工大机器人(岳阳)军民融合研究院
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Problems solved by technology
For the measurement of the oscillation frequency of the spokes of the ion source, the main method currently used is probe measurement. By arranging probes at different positions in the discharge channel, the current changes at each point are measured. However, the probe measurement will disturb the plasma in the channel. It leads to inaccurate measurement results, and cannot monitor all the circumferential channels, which is not conducive to measuring the spoke oscillation characteristics at various azimuth angles
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[0013] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments It is a part of embodiments of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0014] The ion source circumferential spoke oscillation remote measurement system of the present invention is as figure 1 As shown, the system includes an ion source 1 , a high-speed camera 2 , a vacuum tank 3 , an observation window 4 , a guide rail 5 and a computer 6 .
[0015] Wherein, the ion source 1 is a Hall ion source, which is arran...
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The invention relates to a long-distance measurement system and measurement method for ion source circumferential spoke oscillation. By using a high-speed camera to take photos of the circumferential discharge channel of the Hall ion source, the photos are converted into matrix information and imported into MATLAB programs for processing, and calculation The vibration frequency and rotation speed of the spokes of the ion source changing with the working conditions are obtained. According to the obtained slope of the rotating spoke in the angle-versus-time diagram, the rotating speed of the spoke can be measured and calculated, and then the frequency of the spoke oscillation can be obtained. This application effectively solves the interference problem of the invasive measurement of the spoke oscillation of the Hall ion source, and the non-invasive measurement improves the measurement precision and accuracy, and at the same time fills the gap in the method of measuring the rotating spokes of the Hall ion source.
Description
technical field [0001] The invention relates to the ion source technology, in particular to a long-distance measurement system and a measurement method for ion source circumferential spoke oscillation. Background technique [0002] The Hall ion source is widely used in various industrial processes because of its simple structure, moderate ion energy, and high ion density. Low-frequency oscillation refers to the large-scale discharge current spontaneous oscillation observed during the operation of the Hall ion source. It is an inevitable phenomenon during the operation of the Hall ion source. The frequency is between 10-100kHz, and the amplitude is often large. It can reach 100% of the average value of the discharge current, which is closely related to the ionization and acceleration process inside the ion source, and has a serious impact on the performance of the ion source. Circumferential rotating spokes are a kind of low-frequency oscillation. The rotating spokes will ca...
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IPC IPC(8): G01N21/85
CPCG01N21/85
Inventor 魏立秋唐井峰丁永杰李文博杨鑫勇卢惠民于达仁
Owner 哈工大机器人(岳阳)军民融合研究院