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Gas flow calibration method, device, control system and storage medium

A technology of gas flow and calibration method, which is applied in measurement devices, liquid/fluid solid measurement, volume measurement, etc., can solve problems such as the inability to meet the requirements of flow accuracy, and achieve the effect of improving work efficiency and control accuracy.

Active Publication Date: 2021-01-15
BEIJING SEVENSTAR FLOW CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Simply using conversion factors between different gases will result in the actual gas not meeting the flow accuracy requirements over the full scale range

Method used

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  • Gas flow calibration method, device, control system and storage medium
  • Gas flow calibration method, device, control system and storage medium
  • Gas flow calibration method, device, control system and storage medium

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Embodiment Construction

[0042] Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that the relative arrangements of components and steps, numerical expressions and numerical values ​​set forth in these embodiments do not limit the scope of the present invention unless specifically stated otherwise.

[0043] At the same time, it should be understood that, for the convenience of description, the sizes of the various parts shown in the drawings are not drawn according to the actual proportional relationship.

[0044]The following description of at least one exemplary embodiment is merely illustrative in nature and in no way taken as limiting the invention, its application or uses.

[0045] Techniques, methods and devices known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, such techniques, methods and devices should be considered part of the descripti...

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Abstract

The embodiment of the invention discloses a gas flow calibration method and device, a control system and a storage medium. The method comprises the steps that actual flow rates and theoretical flow rates of calibrated gas corresponding to a plurality of set points are obtained, flow coefficients are calculated, a polynomial fitting method is adopted to obtain a curve equation of the relationship between the flow coefficients and the set points, a gas flow equation is obtained according to the curve equation and a flow theory equation, and the actual flow rates of the gas are determined according to the gas flow equation and gas flow conversion coefficients. The gas flow calibration method and device, the control system and the storage medium have the advantages that the accuracy requirements of the flow detection in the whole range can be met, the flow conversion among different gases can be achieved, the control precision of the flow rates is improved, and the work efficiency is improved.

Description

technical field [0001] The invention relates to the technical field of flow detection, in particular to a gas flow calibration method, device, control system, and storage medium. Background technique [0002] A mass flow controller (MFC for short) is a gas flow control device for providing high precision and fast response. The working principles of mass flow controllers are thermal-based, pressure differential-based, pressure-volume-temperature-based (PVT-based), pressure-based (pressure-based), etc. The pressure-type mass flow controller (pressure-type MFC) works by using the speed of the gas passing through the flow-restricting hole to reach the speed of sound under certain conditions. And will not increase again, this flow state is also called blocked flow. [0003] In the blocked flow state, the gas flow through the restricted orifice is directly proportional to its inlet pressure, and is also related to parameters such as the area of ​​the restricted orifice and gas p...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01F15/00
CPCG01F15/002
Inventor 何漫丽牟昌华杜井庆
Owner BEIJING SEVENSTAR FLOW CO LTD