Method, device and system for measuring thickness of parallel movable electrode

A technology of thickness measurement and moving electrodes, which is applied in the field of parallel movable electrode thickness measurement, can solve problems such as the inability to accurately measure the thickness of movable electrodes of electrostatic transducers, and achieve the effect of avoiding errors and improving accuracy

Active Publication Date: 2019-03-19
CHINA ELECTRONICS PROD RELIABILITY & ENVIRONMENTAL TESTING RES INST THE FIFTH ELECTRONICS RES INST OF MIITCEPREI LAB
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Problems solved by technology

[0004] However, during the implementation process, the inventors found that there are at least the following problems in the traditional technology: the traditional measurement technology cannot accurately measure the thickness of the movable electrode of the electrostatic transducer

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  • Method, device and system for measuring thickness of parallel movable electrode
  • Method, device and system for measuring thickness of parallel movable electrode
  • Method, device and system for measuring thickness of parallel movable electrode

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Embodiment Construction

[0038] In order to make the purpose, technical solution and advantages of the present application clearer, the present application will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present application, and are not intended to limit the present application.

[0039] In order to solve the problem that the traditional measurement technology cannot accurately measure the thickness of the movable electrode of the electrostatic transducer, in one embodiment, as figure 1 As shown, a method for measuring the thickness of parallel movable electrodes is provided, including the following steps:

[0040] Step S110, obtaining the distance between the electrodes of the electrostatic transducer corresponding to each bias voltage; the distance between the electrodes is the distance from the first end surface of the movable electrode of the el...

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Abstract

The invention relates to a method, device and system for measuring the thickness of a parallel movable electrode. The method comprises the following steps of: acquiring the inter-electrode distance ofan electrostatic transducer respectively corresponding to each bias voltage, wherein the inter-electrode distance is the distance from a first end face of the movable electrode of the electrostatic transducer to a first end face of the fixed electrode; the first end face of the movable electrode is arranged far away from the fixed electrode; the first end face of the fixed electrode is arranged close to the movable electrode; the thickness of the movable electrode is obtained according to each bias voltage and each inter-electrode distance, therefore, the relationship among the bias voltage,the inter-electrode distance and the thickness of the movable electrode is established by a method for measuring the thickness of the parallel movable electrode, the error caused by direct instrumentmeasurement is avoided, and the precision of measuring the thickness of the movable electrode of the electrostatic transducer with a parallel structure is improved, so that good support is provided for analyzing the performance of the electrostatic transducer.

Description

technical field [0001] The present application relates to the technical field of micro-electromechanical systems, in particular to a method, device and system for measuring the thickness of parallel movable electrodes. Background technique [0002] An electrostatic transducer is a capacitor made of two conductors that can store opposite charges. According to function, electrostatic transducers can be divided into sensors and actuators. In the field of MEMS (Micro Electro Mechanical Systems, microelectromechanical systems), because many devices usually have a large surface area / volume ratio and very small mass, electrostatic force has become a common driving method in MEMS, so that electrostatic transducers widely used in this field. Among them, common electrostatic MEMS devices include RF (Radio Frequency, passive devices) MEMS switches, MEMS micromirrors, MEMS inertial devices, and the like. [0003] In the structure of the electrostatic transducer, the thickness of the ...

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Application Information

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IPC IPC(8): G01B21/08G01B11/14
CPCG01B11/14G01B21/08
Inventor 黄钦文恩云飞王蕴辉朱军华董显山
Owner CHINA ELECTRONICS PROD RELIABILITY & ENVIRONMENTAL TESTING RES INST THE FIFTH ELECTRONICS RES INST OF MIITCEPREI LAB
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