Dual-drive gantry platform driving system, method, and device and computer-readable memory

Abstract

The invention provides a dual-drive gantry platform driving system, method, and device and a computer-readable memory. The driving system comprises a first position detecting unit, a second position detecting unit, a compensation value acquiring unit, a deflection angle control unit, and a decoupling control unit. The first position detecting unit is configured to acquire a first position; the second position detecting unit is configured to acquire a second position; the compensation value acquiring unit is configured to acquire a deflection angle of a cross beam; the deflection angle controlunit is used for carrying compensation on a deflection instruction to obtain a defection moment; and the decoupling control unit carries out decoupling by using decoupled variables to obtain a first torque and a second torque, wherein the decoupling variables include the defection moment. According to the invention, the deflection instruction is compensated based on the deflection angle of the cross beam to obtain the defection moment and the defection moment is used as a cross decoupling parameter to compensate the modeling error in actual application, so that the high-speed and high-precision gantry double-drive control is realized.

Description

technical field [0001] Embodiments of the present invention relate to the field of permanent magnet synchronous motor drive systems, and more specifically, relate to a dual-drive gantry platform drive system, method, device, and computer readable memory. Background technique [0002] Dual-Drive Gantry Machine (Dual-Drive Gantry Machine) is widely used in precision manufacturing industries such as light-emitting diodes, semiconductors, flat-panel displays, laser cutting and machine tool processing. [0003] Such as figure 1 Shown is a schematic diagram of a typical double-drive gantry platform, which includes two slide rails 11 , a beam 12 , a slider 13 and a processing head or a Z-axis mechanism 14 . The above-mentioned two slide rails 11 are arranged along the x direction at a certain interval, and the crossbeam 12 straddles the slide rails 11. The two ends of the crossbeam 12 respectively have moving parts and two moving parts that respectively drive the two moving parts ...

AI Technical Summary

Problems solved by technology

[0008] The embodiments of the present invention aim at the above-mentioned cross decoupling scheme based on position synchronization deviation, but there are problems such as weak decoupling ability, great dependence on mechanical structure, complex parameter debugging, and easy to generate yaw vibration, and the master-slave control mode cannot Actively suppress the elastic vibration mode of the beam itself, cannot eliminate the movement of the beam, slider and load, cause disturbance to the synchronous operation of the gantry, have high requirements for the symmetry of the mechanical installation, and have large mechanical wear during high acceleration and deceleration high-speed operation Problem, provide a dual-drive gantry platform drive system, method, device and computer readable memory

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