Method of generating examination recipe and system thereof

Abstract

Provided are a system and a method of generating an examination recipe usable for examining a specimen. The method comprises: capturing images from dies and obtaining noise map indicative of noise distribution on the images; receiving design data representative of a plurality of design groups each having the same design pattern; calculating a group score for each given design group, the group score calculated based on the noise data associated with the given design group and a defect budget allocated for area of the given design group; providing segmentation related to the dies, comprising: associating design groups with segmentation labels indicative of different noise levels based on the group score, thereby obtaining a set of die segments each corresponding to one or more design groupsassociated with the same segmentation label and segmentation configuration data; and generating an examination recipe using the segmentation configuration data.

Description

technical field [0001] The subject matter disclosed herein relates generally to the field of examining samples, and more specifically, to methods and systems for generating inspection protocols that can be used to examine samples. Background technique [0002] Current demands for high density and performance associated with very large scale integration of fabricated devices require sub-micron features, increased transistor and circuit speeds, and improved reliability. As semiconductor processes advance, pattern dimensions such as line widths and other types of critical dimensions continue to shrink. This is also known as a design rule. This requirement requires forming device features with high precision and uniformity, which in turn requires monitoring the manufacturing process, which includes monitoring the Frequent and detailed inspections of installations. [0003] The term "sample" as used in this specification should be interpreted broadly to cover any kind of wafer...

AI Technical Summary

Problems solved by technology

[0009] According to certain aspects of the subject matter disclosed herein, there is provided a computerized system for generating an inspection protocol that can be used to inspect a sample, the system comprising: an inspection tool configured to generate a sample from one or more dies of the sample capturing one or more images, and obtaining a noise map indicative of a noise distribution on the one or more images; an I / O interface configured to receive design data for the one or more dies, the design data representing a plurality of design groups, each design group corresponding to one or more die regions having the same design pattern; and a processing unit operatively connected to said inspection tool and said I / O interface, said processing The unit includes a memory and a processor operatively coupled to the memory, wherein the processing unit is configured to: calculate a group score for each given design group, wherein the noise map is aligned with the design data, causing each given design grouping of the plurality of design groupings to be associated with noise data within the die area corresponding to the given design grouping, and wherein the grouping score is based on noise data associated with the grouping and a defect budget allocated for the area of ​​the given design grouping; providing a segment related to the one or more dies, comprising: based on all The group scoring described associates each given design group using one of a set of predefined segment labels indicating different noise levels, resulting in a set of die segments, each die segment a segment corresponding to one or more design groupings associated with the same segment label and segment configuration data providing information for the segment; and generating a check plan using the segment configuration data

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