Multifunctional composite objective table
A stage and multi-functional technology, applied in the field of optical inspection, can solve problems such as difficult surface inspection, complicated workflow, error-prone, etc.
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[0022] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0023] See Figure 1-Figure 3 , a multi-functional composite stage, including a fixed table 1, an electric rotary table 2 installed on the fixed table 1, a rotary table 3 arranged above the electric rotary table 2 and connected to the electric rotary table 2 by driving , four load-bearing fixing components arranged on the rotary table 3, and four sets of hemming strip fixing components arranged at the edge of the rotary table 3;
[0024] The rotary table 3 in...
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