Substrate alignment method

Abstract

The invention provides a substrate alignment method. The substrate alignment method comprises pre-arranging a reflective interference recognition area on a first alignment mark on a photomask; movinga substrate in order that a second alignment mark on the substrate is below the first alignment mark and is located outside the reflective interference recognition area; enabling an image sensor to focus on the first alignment mark for recognition, wherein in the recognition process, the reflective interference of the second alignment mark can be avoided so as to accurately obtain the position ofthe first alignment mark. The method is not required to modify the structure of an alignment device, is just required to change the alignment logic of the alignment device to prevent the reflective interference of the second alignment mark on the substrate from affecting the accuracy of the alignment, and improves the accuracy and success rate of recognizing the first alignment mark on the photomask.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a substrate alignment method. Background technique [0002] Thin Film Transistor (TFT) is the main driving element in current Liquid Crystal Display (LCD) and Active Matrix Organic Light-Emitting Diode (AMOLED). It is related to the display performance of the flat panel display device. [0003] Most of the liquid crystal displays currently on the market are backlight liquid crystal displays, which include a liquid crystal display panel and a backlight module. The working principle of the liquid crystal display panel is to pour liquid crystal molecules between the thin film transistor array substrate (ThinFilm Transistor Array Substrate, TFT Array Substrate) and the color filter (ColorFilter, CF) substrate, and apply pixel voltage on the two substrates respectively. and the common voltage, through the electric field formed between the pixel voltage and the common voltage to con...

AI Technical Summary

Problems solved by technology

[0005] The steps for aligning the glass substrate Mark and the mask Mark in the prior art are as follows: 1. Move the CCD to the top of the mask Mark; 2. Move the glass substrate Mark to directly below the mask Mark; In the same window, 4. The CCD focuses on the mask Mark for identification, 5. The CCD focuses on the glass substrate Mark for identification and positioning, and 6. The positions of the two Marks are combined for calculation; The glass substrate Mark is also made of metal, so it will also appear bright white after reflection. When the two Marks are aligned, they all appear bright white in the same window. When the CCD focuses on the mask Mark, it will be reflected by the lower glass substrate Mark. Influence, which seriously interferes with the recognition effect of CCD, resulting in failure of recognition, and manual alignment adjustment is required in the follow-up, which will seriously affect the automatic production of products

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