Method and system capable of controlling temperature change process of aging life test chamber in high temperature environment
An environmental test chamber, high temperature environment technology, used in semiconductor working life testing, single semiconductor device testing and other directions, can solve the problems of poor control accuracy, poor test repeatability, complex operation, etc., to achieve the effect of improving consistency
Active Publication Date: 2021-06-25
PRIME REL ELECTRONIC TECH CO LTD
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Problems solved by technology
1) The control accuracy is very poor, and it is difficult to ensure the same heating and cooling rates in the two tests, resulting in incompletely consistent temperature changes in each test and poor repeatability of the test
2) It is impossible to preset the temperature change process, such as letting the temperature rise and cool down according to a pre-designed change curve
3) Manual control is required and the operation is complicated
Method used
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Embodiment Construction
[0027] The present invention will be further described below in conjunction with specific drawings and embodiments.
[0028] like figure 2 and image 3 Shown: In order to accurately and quickly adjust the opening degree of the damper and realize the process of controllable temperature change, the present invention includes an environmental test chamber that can provide the required environment for the environmental aging test of the device under test; it also includes a damper baffle that can control the environmental test chamber 9. The air door baffle control mechanism in the open state; the air door baffle control mechanism is electrically connected to the system controller, and the temperature tolerance σ, the change step size Δβ of the air door baffle 9 opening angle α, Temperature control feedback period T wait ; The method comprises the steps of:
[0029] Step W1, determine the curve T of the target temperature in the environmental test chamber as a function of time...
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The invention relates to a control method and system, in particular to a method and a system capable of controlling the temperature change process of a high-temperature environment aging life test chamber, belonging to the technical field of high-temperature environment aging tests. The present invention presets the curve T of temperature changing with time aim (t), during the test, according to the current opening angle α of the damper baffle and the current temperature T in the environmental test chamber real , adjust the opening angle α of the damper damper 9 in real time through the damper damper control mechanism, and finally make the temperature in the environmental test chamber change according to the curve T of the preset temperature with time aim (t) change. This technology can make the temperature rising process at the beginning and the cooling process at the end of the environmental aging life test more controllable, which is conducive to improving the consistency of the test process.
Description
technical field [0001] The invention relates to a control method and system, in particular to a temperature control method and system for a high-temperature environment aging life test chamber, belonging to the technical field of high-temperature environment aging tests. Background technique [0002] High temperature environmental aging life test is a common method to evaluate the quality of semiconductor devices, such as HTRB (High Temperature Reverse Bias, high temperature reverse bias test), HTGB (High Temperature Gate Bias, high temperature gate bias test), HTFB (High Temperature Forward Bias, high temperature forward bias test) Partial test), HTOL (High Temperature Operating Life, high temperature operating life), etc. The principle of high-temperature environmental aging life test is to place semiconductor devices under high-temperature environmental conditions and apply specific electrical stress to quickly evaluate their life and reliability by accelerating the aging...
Claims
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IPC IPC(8): G01R31/26
CPCG01R31/2642
Inventor 张文亮雷小阳李文江朱阳军
Owner PRIME REL ELECTRONIC TECH CO LTD