Method and application of femtosecond laser direct writing processing with near 4π solid angle using multiphoton excitation

Abstract

The invention discloses a method and application of femtosecond laser direct writing processing with a near 4π solid angle by using multi-photon excitation, which belongs to the technical field of laser processing. The main principle of the out-of-focus problem when performing direct writing with a large buried depth is to split the femtosecond laser beam and then focus it inside the material to be processed, so that the energy of multiple photons can be "sufficient" to the corresponding energy threshold of the original single-photon excitation , so as to achieve the processing purpose of material modification. At the same time, the time-domain synchronization of the sub-beams after beam splitting is adjusted, and they are finally nearly orthogonally converged at the position to be processed, so as to obtain a near-spherical focal spot with a solid angle of nearly 4π. In this way, the use of multiphoton lasers solves the out-of-focus problem of femtosecond laser direct writing at large embedding depths, and a three-dimensional embedding structure with uniform properties at different processing depths can be obtained.

Description

technical field [0001] The invention belongs to the technical field of laser processing, and specifically relates to direct writing processing of femtosecond laser with large embedded depth by using multi-photon excitation. Direct-write processing of excited 3D buried structures. [0002] technical background [0003] Quantum information technology has become one of the key technologies developed by various countries because of its super parallel computing capabilities, large-capacity information transmission and processing capabilities, and high security characteristics based on the basic principles of quantum mechanics. Among the many physical systems that can support quantum information technology, photons have become the most important quantum information carrier due to their good generation, manipulation and detection characteristics. Furthermore, in order to meet the stability requirements of quantum computer systems, basic components such as beam splitters and wavegui...

AI Technical Summary

Problems solved by technology

Multi-photon excitation is used instead of traditional single-photon excitation to solve the out-of-focus problem when using femtosecond laser for direct writing with a large buried depth. The energy of each photon "makes up" the corresponding energy threshold of the original single-photon excitation, so as to achieve the processing purpose of material modification

In this way, the use of multi-photon laser solves the out-of-focus problem of femtosecond laser direct writing with large buried depth, and can obtain three-dimensional buried structures with uniform properties at different processing depths

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