A method and application of femtosecond laser direct writing processing with continuously adjustable depth near 4π solid angle

A technology of femtosecond laser and solid angle, applied in metal processing equipment, laser welding equipment, manufacturing tools, etc., to achieve the effect of reducing defocus

Active Publication Date: 2020-05-19
JILIN UNIV
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  • Application Information

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Problems solved by technology

Two-photon excitation is used instead of traditional single-photon excitation to solve the defocus problem when using femtosecond laser to write waveguide directly. At the same time, a glass quadrangular prism is introduced to control the split laser beams to enter the glass quadrangular prism and then converge orthogonally to form a near-spherical shape. Focus spot for continuously adjustable processing depth inside the sample
In this way, the use of two-photon excitation and glass quadrangular prism simultaneously solves the problem of defocusing when the femtosecond laser is directly written at a large buried depth and the problem of continuous adjustment of the processing depth, and can prepare materials with different processing depths and uniform properties in the material to be processed. 3D Embedded Waveguide

Method used

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  • A method and application of femtosecond laser direct writing processing with continuously adjustable depth near 4π solid angle
  • A method and application of femtosecond laser direct writing processing with continuously adjustable depth near 4π solid angle
  • A method and application of femtosecond laser direct writing processing with continuously adjustable depth near 4π solid angle

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Effect test

Embodiment 1

[0034] Two-photon excitation is achieved by adjusting the time-domain synchronization of sub-beam femtosecond laser pulses.

[0035] The method of using two-photon excitation to "combine" energy can also provide the energy required for material modification. By adding a glass quadrangular mirror QL and a refractive index matching liquid on the surface of the sample, the two facets perpendicular to each other of the laser vertical incidence QL are adjusted, so that the two femtosecond laser beams do not refract when they enter the sample through the QL, thus effectively The defocusing is weakened and the near-spherical two-photon excitation focal spot with a solid angle of nearly 4π is obtained, which solves the serious defocusing of the single-beam femtosecond laser in direct writing processing with a large buried depth. In order to ensure that the energy of the two photons can be effectively superimposed, the femtosecond laser needs to be divided into beams and adjusted seque...

Embodiment 2

[0046] Fabrication of buried depth-varying glass waveguide devices using a two-photon excitation focal spot with nearly 4π solid angle.

[0047] By synchronously controlling the movement of the sample stage and the piezoelectric platform up and down, the continuous adjustment of the depth of the two-photon excitation focal spot inside the material to be processed can be realized, so that the direct writing processing of the three-dimensional waveguide structure with a large buried depth can be realized.

[0048] Three-dimensional embedded structure processing using two-photon excitation focal spot with nearly 4π solid angle:

[0049] (1), pulse time synchronous rough adjustment: with embodiment 1,

[0050] (2), pulse space synchronization adjustment: same as embodiment 1.

[0051] (3), synchronous fine-tuning of pulse time: same as embodiment 1.

[0052] (4) Three-dimensional embedded structure direct writing: the material to be processed is glass, and the embedding depth to...

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Abstract

The invention discloses a method and application of femtosecond laser direct writing processing with a depth continuously adjustable near 4π solid angle, which belongs to the technical field of laser processing. At the same time, a quadrangular prism is introduced to realize the continuous adjustment of the processing depth inside the sample; after the femtosecond laser beam is split, it is focused and perpendicularly incident on the corresponding rectangular surface of a quadrangular prism whose height is controlled by a piezoelectric platform. , to reach the inside of the material to be processed, the energy of the two photons is "sufficient" in the material to the corresponding energy threshold excited by the original single photon, and then the quadrangular prism and the sample move synchronously in the Z-axis direction by controlling the piezoelectric platform and the sample motion platform At the same time, it solves the problem of defocusing when the femtosecond laser is directly written with a large buried depth and the problem of continuous adjustment of the processing depth, and can prepare three-dimensional embedded waveguides with different processing depths and uniform properties in the material to be processed.

Description

technical field [0001] The invention belongs to the technical field of laser processing, and specifically relates to femtosecond laser direct writing processing of glass waveguides with continuously variable processing depth by using two-photon excitation. The beam-splitting laser is adjusted to be perpendicular to the two surfaces of the glass triangular prism, so as to realize the direct writing process of the glass waveguide with continuously variable buried depth based on multiphoton excitation. [0002] technical background [0003] Optical waveguides are the basis of integrated optics. Compared with methods such as ultraviolet exposure, ion diffusion, and ion / neutron implantation to make optical waveguides, femtosecond laser direct writing processing technology has the characteristics of high precision and three-dimensional processing, and can realize waveguide direct writing in almost any transparent medium. . Cross-sectional symmetry is one of the necessary conditio...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B23K26/06B23K26/064
Inventor 孙洪波田振男李泽政陈岐岱
Owner JILIN UNIV
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