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A Femtosecond Laser Focus Array Directly Writes Circular Waveguide and Realizes Stable Coupling Method and Application

A femtosecond laser and circular waveguide technology, applied in the coupling of optical waveguides, optical waveguides, optical waveguides, etc., can solve problems such as defocusing, achieve stable coupling and improve integration.

Active Publication Date: 2021-12-07
JILIN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The present invention uses a spatial light modulator to replace the traditional single focus with a multi-focus array to solve the defocus problem when using femtosecond laser for waveguide direct writing

Method used

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  • A Femtosecond Laser Focus Array Directly Writes Circular Waveguide and Realizes Stable Coupling Method and Application
  • A Femtosecond Laser Focus Array Directly Writes Circular Waveguide and Realizes Stable Coupling Method and Application
  • A Femtosecond Laser Focus Array Directly Writes Circular Waveguide and Realizes Stable Coupling Method and Application

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Experimental program
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Effect test

Embodiment 1

[0029] Improving waveguide circularity by using spatial light modulator to modulate femtosecond laser multi-focus array for direct writing.

[0030] The method of "gathering" energy by using a multi-focus array with closely arranged sub-focus can also provide the energy required for material modification, without using complex defocus compensation algorithms, by loading the finely designed multi-focus array on the spatial light modulator Hologram, so that the single focus is converted into a multi-focus array, which solves the defocusing problem of the single-beam femtosecond laser during waveguide direct writing processing, and compared with the traditional longitudinal direct writing, slit, cylindrical lens and other shaping methods, it can be prepared Circular waveguides with arbitrary lengths and directions greatly reduce the difficulty of preparing circular waveguides.

[0031] Using the spatial light modulator to modulate the femtosecond laser multi-focus array direct wr...

Embodiment 2

[0040] Using a spatial light modulator to modulate a femtosecond laser multi-focus array direct-writing waveguide directional coupler with a circular end face, and comparing the difference in coupling capability in the horizontal and vertical directions with that of a single-focus direct-writing ordinary waveguide directional coupler at the same depth, Specific steps are as follows:

[0041] (1), leveling of the sample stage: same as embodiment 1.

[0042] (2) Single-focus direct writing of ordinary waveguide directional coupler: First, rotate the optical axis of the half-wave plate HWP so that the laser power before the objective lens OL enters the pupil is 260mW; then, load it on the computer PC and write it in advance The processing program of the directional coupler is directly written on the O-XZ plane and the 0-XY plane respectively as Figure 4 The directional coupler shown; wherein, the distance between the two input arms of the directly written directional coupler is...

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Abstract

The invention discloses a method for directly writing a circular waveguide by a femtosecond laser focus array and realizing stable coupling, which belongs to the technical field of laser processing and solves the defocusing problem when the femtosecond laser directly writes in a transparent medium, and is different from traditional beam shaping Compared with the above technology, the preparation of circular waveguides with arbitrary lengths and directions has been realized. A beam of femtosecond laser is modulated into a specially designed multi-focus array by the spatial light modulator SLM after passing through the beam expander system, and the direct writing power is controlled by finely adjusting the optical axis of the half-wave plate HWP, thereby preparing a circular end face waveguide . At the same time, through the characterization of the multi-focus array direct-writing circular waveguide directional coupler in the O-XZ and 0-XY planes, it is proved that the multi-focus array direct-writing waveguide coupling ability is consistent in the vertical Z and horizontal Y directions, and different couplings are realized. The stable coupling of the direction is conducive to promoting the preparation of three-dimensional coupled waveguide devices and the development of three-dimensional photonic chips.

Description

technical field [0001] The invention belongs to the technical field of laser processing, and in particular relates to the femtosecond laser direct writing processing of a circular-end glass waveguide stably coupled by using a spatial light modulator (SLM) to modulate a multi-focus array. By designing the spacing and arrangement of sub-focus points in the focus array In this way, the optimal rotation angle (ORA) algorithm is used to calculate the corresponding hologram (CGH) and load it on the spatial light modulator SLM, so as to realize the femtosecond laser multi-focus array direct writing processing of the stably coupled circular end-face waveguide. [0002] technical background [0003] As the most basic and important component in an integrated photonic chip, an optical waveguide is a high-refractive-index region covered by a low-refractive-index cladding. Compared with planar lithography, ion diffusion, ion / neutron implantation and other methods of making optical wavegui...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B6/10G02B6/122G02B6/24G03H1/00G03H1/04G03H1/08G03H1/12
CPCG02B6/10G02B6/122G02B6/24G02B2006/12142G02B2006/12147G02B2006/12166G03H1/0005G03H1/0443G03H1/0808G03H1/0866G03H1/12
Inventor 孙洪波李泽政田振男陈岐岱
Owner JILIN UNIV
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