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Two rotations and one translation, large stroke, low thickness, large hollow parallel piezoelectric micro-motion platform

A micro-motion platform and low-thickness technology, which is applied in the direction of large fixed members, metal processing equipment, metal processing machinery parts, etc., can solve the problems of high platform height, non-compact platform, small platform displacement stroke, etc., and achieve simple and compact structure, reduce The effect of small driving area and thickness reduction

Active Publication Date: 2021-03-09
NINGBO UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This implementation method has high platform rigidity and fast response, but it also has the following disadvantages: due to the long connecting rod, the moving platform is far away from the fixed platform, and on the one hand, the platform structure is huge and not compact; on the other hand, the platform height is too large , it is difficult to apply to occasions that require the platform to have a low thickness; because the displacement amplification mechanism is not used, the displacement stroke of the platform is small; when rotating around one axis, a coupling angle around the other axis will be generated at the same time

Method used

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  • Two rotations and one translation, large stroke, low thickness, large hollow parallel piezoelectric micro-motion platform
  • Two rotations and one translation, large stroke, low thickness, large hollow parallel piezoelectric micro-motion platform
  • Two rotations and one translation, large stroke, low thickness, large hollow parallel piezoelectric micro-motion platform

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Embodiment Construction

[0030]Embodiments of the present invention will be described in further detail below in conjunction with the accompanying drawings.

[0031] Figure 1 to Figure 6 It is a structural schematic diagram of the present invention. The reference signs therein are: base 1, enclosure 11, tubular body 1, first drive unit 21, second drive unit 22, third drive unit 23, fourth drive unit 24, moving table surface 3, hollow hole 31, First screw 41, first threaded hole 411, first counterbore 412, second screw 42, second threaded hole 421, second through hole 422, third screw 43, third threaded hole 431, first through hole 432 , the fourth screw 44, the fourth threaded hole 441, the fifth screw 45, the fifth threaded hole 451, the sixth screw 46, the sixth threaded hole 461, the second counterbore 462, the primary bridge type amplification mechanism 51, the first Rigid part 511, second rigid part 512, third rigid part 513, fourth rigid part 514, first flexible sheet 515, second flexible she...

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Abstract

The invention discloses a two-rotation one-translation large-stroke small-thickness large-hollow parallel piezoelectric micro-motion platform. The two-rotation one-translation large-stroke small-thickness large-hollow parallel piezoelectric micro-motion platform includes a moving table movably arranged at the upper portion of a base in a gap mode, a first driving unit, a second driving unit, a third driving unit and a fourth driving unit distributed in rectangular shape in sequence are arranged at the base, the first driving unit, the second driving unit, the third driving unit and the fourthdriving unit are independently retracted and stretched and arranged on the moving table, a z axis perpendicular to the moving table is set, a y axis is from the second driving unit to the first driving unit, an x axis is from the second driving unit to the third driving unit, and the moving table can complete the lifting of up and down along the z axis, and can complete the x axis tilt rotation and y axis tilt rotation. The two-rotation one-translation large-stroke small-thickness large-hollow parallel piezoelectric micro-motion platform has the advantages that the structure is simple and compact, the displacement stroke is high, no displacement coupling is achieved, the moving table and the base have large hollow, and a displacement sensor is prone to integrating.

Description

technical field [0001] The invention belongs to the field of nano-positioning technology, and relates to a micro-displacement mechanism in a nano-positioning system, in particular to a piezoelectric micro-motion platform with two rotations and one translation, large stroke, low thickness, large hollow, and parallel connection. Background technique [0002] The piezoelectric micro-motion platform is a micro-displacement mechanism that transmits displacement and force by driving a flexible mechanism that can produce elastic deformation through a piezoelectric actuator. Because it has no hinges and bearings, it does not require assembly, there is no transmission gap, and no friction and wear; because it is driven by a piezoelectric actuator, its displacement resolution can reach nanometers, and its response time can reach milliseconds. Large, small size, strong carrying capacity. Therefore, it is widely used in technical fields that require micro / nano positioning, such as prec...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B23Q1/34
Inventor 崔玉国万光继李锦棒马剑强孙靖康汪家乐
Owner NINGBO UNIV
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