Two rotations and one translation, large stroke, low thickness, large hollow parallel piezoelectric micro-motion platform

Abstract

The invention discloses a two-rotation one-translation large-stroke small-thickness large-hollow parallel piezoelectric micro-motion platform. The two-rotation one-translation large-stroke small-thickness large-hollow parallel piezoelectric micro-motion platform includes a moving table movably arranged at the upper portion of a base in a gap mode, a first driving unit, a second driving unit, a third driving unit and a fourth driving unit distributed in rectangular shape in sequence are arranged at the base, the first driving unit, the second driving unit, the third driving unit and the fourthdriving unit are independently retracted and stretched and arranged on the moving table, a z axis perpendicular to the moving table is set, a y axis is from the second driving unit to the first driving unit, an x axis is from the second driving unit to the third driving unit, and the moving table can complete the lifting of up and down along the z axis, and can complete the x axis tilt rotation and y axis tilt rotation. The two-rotation one-translation large-stroke small-thickness large-hollow parallel piezoelectric micro-motion platform has the advantages that the structure is simple and compact, the displacement stroke is high, no displacement coupling is achieved, the moving table and the base have large hollow, and a displacement sensor is prone to integrating.

Description

technical field [0001] The invention belongs to the field of nano-positioning technology, and relates to a micro-displacement mechanism in a nano-positioning system, in particular to a piezoelectric micro-motion platform with two rotations and one translation, large stroke, low thickness, large hollow, and parallel connection. Background technique [0002] The piezoelectric micro-motion platform is a micro-displacement mechanism that transmits displacement and force by driving a flexible mechanism that can produce elastic deformation through a piezoelectric actuator. Because it has no hinges and bearings, it does not require assembly, there is no transmission gap, and no friction and wear; because it is driven by a piezoelectric actuator, its displacement resolution can reach nanometers, and its response time can reach milliseconds. Large, small size, strong carrying capacity. Therefore, it is widely used in technical fields that require micro / nano positioning, such as prec...

AI Technical Summary

Problems solved by technology

This implementation method has high platform rigidity and fast response, but it also has the following disadvantages: due to the long connecting rod, the moving platform is far away from the fixed platform, and on the one hand, the platform structure is huge and not compact; on the other hand, the platform height is too large , it is difficult to apply to occasions that require the platform to have a low thickness; because the displacement amplification mechanism is not used, the displacement stroke of the platform is small; when rotating around one axis, a coupling angle around the other axis will be generated at the same time

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