Two rotations and one translation large stroke uncoupled large hollow parallel piezoelectric micro-motion platform

Abstract

The invention discloses a two-rotation one-translation large-stroke non-coupling large hollow parallel piezoelectric micro-movement platform, which includes a moving platform for carrying objects. The gap between the moving platforms is provided with a base, and the base is provided with first drive units arranged in a rectangular order. , the second drive unit, the third drive unit and the fourth drive unit; the first drive unit, the second drive unit, the third drive unit and the fourth drive unit are independently retractable and arranged under the moving table, the first drive unit and the second drive unit The first displacement sensor facing the moving table is arranged between the two driving units, the second displacement sensor facing the moving table is arranged between the third driving unit and the fourth driving unit, and the distance between the first driving unit and the fourth driving unit is A third displacement sensor facing the moving table is arranged between them. The invention can complete the lifting and lowering of the movable table along the z-axis, and the tilting rotation along the x-axis and y-axis. The invention has the advantages of simple and compact structure, large working surface, no displacement coupling, high natural frequency and convenient integration of capacitive displacement sensors.

Description

technical field [0001] The invention belongs to the field of nano-positioning technology, and relates to a micro-displacement mechanism in a nano-positioning system, in particular to a two-rotation-one-translation large-stroke non-coupling large hollow parallel piezoelectric micro-motion platform. Background technique [0002] The piezoelectric micro-motion platform is a micro-displacement mechanism that transmits displacement and force by driving a flexible mechanism that can produce elastic deformation through a piezoelectric actuator. Because it has no hinges and bearings, it does not require assembly, there is no transmission gap, and no friction and wear; because it is driven by a piezoelectric actuator, its displacement resolution can reach nanometers, and its response time can reach milliseconds. Large, small size, strong carrying capacity. Therefore, it is widely used in technical fields that require micro / nano positioning, such as precision processing and testing, ...

AI Technical Summary

Problems solved by technology

This implementation method has high platform rigidity and fast response, but it also has the following disadvantages: due to the long connecting rod, the moving platform is far away from the fixed platform, which makes the platform structure large and not compact; because the displacement amplification mechanism is not used, the displacement stroke of the platform is small ;When rotating around one axis, there will be a coupled rotation around the other axis at the same time

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