Two rotations and one translation large stroke uncoupled large hollow parallel piezoelectric micro-motion platform

A micro-motion platform, no coupling technology, applied in the field of micro-displacement mechanism, two rotations and one translation, large stroke without coupling, large hollow parallel piezoelectric micro-motion platform, which can solve the problems of large platform structure, small platform displacement stroke, and non-compactness

Active Publication Date: 2020-12-04
NINGBO UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This implementation method has high platform rigidity and fast response, but it also has the following disadvantages: due to the long connecting rod, the moving platform is far away from the fixed platform, which makes the platform structure large and not compact; because the displacement amplification mechanism is not used, the displacement stroke of the platform is small ;When rotating around one axis, there will be a coupled rotation around the other axis at the same time

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  • Two rotations and one translation large stroke uncoupled large hollow parallel piezoelectric micro-motion platform
  • Two rotations and one translation large stroke uncoupled large hollow parallel piezoelectric micro-motion platform
  • Two rotations and one translation large stroke uncoupled large hollow parallel piezoelectric micro-motion platform

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Embodiment Construction

[0034] Embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0035] Figure 1 to Figure 9 It is a structural schematic diagram of the present invention, wherein the reference signs are: base 1, enclosure 11, tubular body 12, first drive unit 21, second drive unit 22, third drive unit 23, fourth drive unit 24, base Seat 3, first plate body 301, flexible folding beam 302, second plate body 303, sensor probe 304, first displacement sensor 31, second displacement sensor 32, third displacement sensor 33, primary bridge amplification mechanism 41, Secondary bridge amplifying mechanism 42, piezoelectric actuator 43, first rigid part 411, second rigid part 412, third rigid part 413, fourth rigid part 414, first flexible sheet 415, second flexible sheet 416, The fifth rigid part 421, the sixth rigid part 422, the seventh rigid part 423, the eighth rigid part 424, the third flexible thin plate 425, the moving tab...

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Abstract

The invention discloses a two-rotation one-translation large-stroke non-coupling large hollow parallel piezoelectric micro-movement platform, which includes a moving platform for carrying objects. The gap between the moving platforms is provided with a base, and the base is provided with first drive units arranged in a rectangular order. , the second drive unit, the third drive unit and the fourth drive unit; the first drive unit, the second drive unit, the third drive unit and the fourth drive unit are independently retractable and arranged under the moving table, the first drive unit and the second drive unit The first displacement sensor facing the moving table is arranged between the two driving units, the second displacement sensor facing the moving table is arranged between the third driving unit and the fourth driving unit, and the distance between the first driving unit and the fourth driving unit is A third displacement sensor facing the moving table is arranged between them. The invention can complete the lifting and lowering of the movable table along the z-axis, and the tilting rotation along the x-axis and y-axis. The invention has the advantages of simple and compact structure, large working surface, no displacement coupling, high natural frequency and convenient integration of capacitive displacement sensors.

Description

technical field [0001] The invention belongs to the field of nano-positioning technology, and relates to a micro-displacement mechanism in a nano-positioning system, in particular to a two-rotation-one-translation large-stroke non-coupling large hollow parallel piezoelectric micro-motion platform. Background technique [0002] The piezoelectric micro-motion platform is a micro-displacement mechanism that transmits displacement and force by driving a flexible mechanism that can produce elastic deformation through a piezoelectric actuator. Because it has no hinges and bearings, it does not require assembly, there is no transmission gap, and no friction and wear; because it is driven by a piezoelectric actuator, its displacement resolution can reach nanometers, and its response time can reach milliseconds. Large, small size, strong carrying capacity. Therefore, it is widely used in technical fields that require micro / nano positioning, such as precision processing and testing, ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B81C99/00
Inventor 崔玉国万光继娄军强杨依领
Owner NINGBO UNIV
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