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MEMS gyroscope with embedded magnetic source

A gyroscope, embedded technology, applied in gyroscope/steering sensing equipment, gyro effect for speed measurement, instrument and other directions, can solve problems such as noise, poor linearity, temperature drift, etc., to improve accuracy, measure Accurate, avoid deformation effect

Inactive Publication Date: 2019-05-10
成都因赛泰科技有限责任公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is to overcome the poor linearity of the detection method in the prior art, the shortcomings of temperature drift and noise generation, and provide a MEMS gyroscope with an embedded magnetic source

Method used

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  • MEMS gyroscope with embedded magnetic source
  • MEMS gyroscope with embedded magnetic source
  • MEMS gyroscope with embedded magnetic source

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Embodiment Construction

[0025] In order to further elaborate the technical means and effects that the present invention adopts to achieve the beneficial purpose of the predetermined invention, the specific implementation, structure, features and effects of the application according to the present invention will be described in detail below in conjunction with the accompanying drawings and preferred embodiments. The description is as follows. In the following description, different "an embodiment" or "embodiment" do not necessarily refer to the same embodiment, and in addition, specific features, structures or characteristics in one or more embodiments may be combined in any suitable form:

[0026] Such as figure 1 The simplified dynamic model of the MEMS gyroscope is shown. Assuming that the MEMS gyroscope detects small angular acceleration, and assuming that there is no angular velocity input in the X and Y directions, and no vibration displacement in the Z direction, then the working mode of the ME...

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Abstract

The invention discloses an MEMS gyroscope with an embedded magnetic source. The MEMS gyroscope comprises a mass block, a driving unit and a detection unit; the driving unit is located in an X direction of the mass block; the detection unit comprises a heat accumulator, a wire and a magnetic sensor; the mass block is located above a substrate; the heat accumulator is installed on the mass block andlocated at the bottom of the mass block; the wire is installed in the heat accumulator; and the magnetic sensor is installed on the substrate and located at the upper end of the substrate. The MEMS gyroscope has the beneficial effects as follows: the displacement of the mass block in a Y direction is detected through the magnetic sensor, so that the measurement is accurate, and the accuracy of the angular velocity is improved; and the heat accumulator isolates Joule heat generated by the electrified wire, so that the deformation, temperature drift and noise of the mass block are avoided.

Description

technical field [0001] The invention relates to the field of MEMS gyroscopes, in particular to a MEMS gyroscope with an embedded magnetic source. Background technique [0002] The gyroscope is also called the angular velocity sensor. Both it and the acceleration sensor belong to the inertial sensor. It is an important mechanical MEMS device. General attention and rapid development. MEMS gyroscopes are based on the Coriolis effect. The Coriolis effect means that when a particle moves in a straight line relative to the inertial system, its trajectory is a curve relative to the rotating system. Based on the rotating system, we believe that there is a The force that drives the trajectory of the particle to form a curve, this force is the Coriolis force F c , where F c =-2mv×Ω where v represents the motion velocity (vector) of the particle relative to the rotating reference system, Ω represents the angular velocity (vector) of the rotating system, m represents the quality of t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/5755G01C19/5733
Inventor 张彪李晓宇
Owner 成都因赛泰科技有限责任公司