Laser direct-writing exposure method of arc-shaped workpiece
A technology of laser direct writing and exposure method, which is used in microlithography exposure equipment, photolithographic process exposure devices, optics, etc., can solve the problems of inability to expose curved workpieces and difficult to complete, and achieve stable exposure focal length and ensure clarity. , Exposure pattern clear effect
Inactive Publication Date: 2019-05-10
钧迪智能装备科技(苏州)有限公司
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Problems solved by technology
This kind of laser direct exposure method still has a disadvantage at present, that is, the laser direct exposure equipment can only expose the surface of the flat workpiece, but cannot expose the surface of the curved workpiece, while the laser direct writing exposure equipment exposes on the plane The method is to use the DMD exposure lens to perform scanning exposure on the plane, but for the surface of the curved workpiece, the surface is not curved, so it is difficult to complete
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[0028] The present invention will be described in further detail below through specific examples.
[0029] A kind of laser direct writing exposure method of curved workpiece, it comprises the following steps:
[0030] S1. Fix the arc-shaped workpiece on a swingable seat. The seat is a cylindrical seat. The arc-shaped workpiece is adsorbed on the adsorption surface of the cylindrical seat by negative pressure. The corresponding cylindrical seat The central angle is 90°; the arc-shaped workpiece has a concave cylindrical surface to be exposed, and the swing center of the seat body coincides with the central axis of the cylindrical surface to be exposed; the definition is parallel to the central axis The direction line is the X axis, and the DMD exposure lens is installed on an X sliding seat that can slide along the X axis. The DMD exposure lens is set radially towards the surface to be exposed, and the radial direction is defined as the Y axis direction;
[0031] S2, position ...
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The invention discloses a laser direct-writing exposure method of an arc-shaped workpiece. The laser direct-writing exposure method of the arc-shaped workpiece comprises the steps of: S1, fixing the arc-shaped workpiece on a swinging base, and installing a DMD exposure lens on an X sliding base; S2, performing position initialization; S3, driving the arc-shaped workpiece to swing by the base, andexposing by the DMD exposure lens in a swinging process, so that an exposure band is formed on a surface to be exposed; S4, moving the X sliding base at the width of the exposure band; S5, driving thearc-shaped workpiece to swing by the base, and exposing by the DMD exposure lens in the swinging process, so that an exposure band is formed again on the surface to be exposed; S6, moving the X sliding base at the width of the exposure band; and S7, repeating the step S3 to the step S6 till all surfaces to be exposed of the arc-shaped workpiece are exposed. The laser direct-writing exposure method can be used for exposing the concave cylindrical surface to be exposed of the arc-shaped workpiece; therefore, an exposure image is clear; and the exposure action is reliable.
Description
technical field [0001] The invention relates to a laser direct writing exposure method, in particular to a laser direct writing exposure method for an arc-shaped workpiece. Background technique [0002] Recently, laser direct imaging technology (Laser Direct Imaging, LDI), that is, a maskless exposure method that does not require a negative, is being widely used to replace the traditional mercury lamp exposure mode using a mask. This kind of laser direct exposure method still has a disadvantage at present, that is, the laser direct exposure equipment can only expose the surface of the flat workpiece, but cannot expose the surface of the curved workpiece, while the laser direct writing exposure equipment exposes on the plane The method is to use the DMD exposure lens to perform scanning exposure on the plane, but it is difficult to complete the surface of the curved workpiece without its surface being curved. Contents of the invention [0003] The technical problem to be s...
Claims
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IPC IPC(8): G03F7/20G03F7/24
Inventor 陈国军宁震坤吴景舟马迪
Owner 钧迪智能装备科技(苏州)有限公司