Photosensitive imaging detection chip based on cutting-edge electron fluorescence excitation and its preparation method
A photosensitive imaging and chip technology, which is used in photometry, photometry using electrical radiation detectors, optical radiation measurement, etc., to achieve fast response and spectral conversion, high detection sensitivity, and improved detection sensitivity.
Active Publication Date: 2020-04-14
NANJING OPY ELECTRONICS TECH CO LTD
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[0004] In view of the above defects or improvement needs of the prior art, the present invention provides a photosensitive imaging detection chip based on cutting-edge electronic fluorescence excitation and its preparation method, the purpose of which is to solve the above-mentioned technical problems existing in the existing photosensitive imaging array, and The photosensitive imaging detection chip based on cutting-edge electronic fluorescence excitation of the present invention has the advantages of high imaging light wave collection efficiency, and realizes incident light amplification and infrared to visible light spectrum conversion through controlled electron emission and fluorescence excitation of nano-tips, thereby significantly improving Improved detection sensitivity and extended spectral response range
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[0051] In order to make the object, technical solution and advantages of the present invention more clear, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not constitute a conflict with each other.
[0052] On the surface of a variety of functional materials (such as conventional metals or semiconducting silicon germanium, etc.), the effect of resonant surface waves can be generated through the radiation excitation of visible light or infrared light; surface waves composed of surface electromagnetic waves and surface electron density waves Or surface plasmon polaritons, the effective tran...
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Abstract
The invention discloses a photosensitive imaging detection chip based on cutting-edge electronic fluorescence excitation, which includes an optical antenna arranged in parallel, a fluorescent film layer, and a photosensitive array. The optical antenna is an array structure composed of a plurality of antenna elements that are spaced apart and electrically connected to each other. , the fluorescent film layer is an array structure composed of multiple fluorescent film elements that are spaced apart and electrically connected to each other. The photosensitive array is composed of multiple fluorescent film elements that are electrically connected to each other. The optical antenna, the fluorescent film layer, and the photosensitive array have the same shape and array scale. The antenna elements of the optical antenna, the fluorescent film elements at corresponding positions in the fluorescent film layer, and the corresponding fluorescent film elements in the photosensitive array The photosensitive elements at the position are aligned with each other in the vertical direction, and the antenna elements of the optical antenna include at least one nanotip cone whose top surfaces are electrically connected to each other. The invention realizes incident light amplification and infrared light to visible light spectrum conversion through electronic controlled emission and fluorescence excitation of nano-tip cones, thereby significantly improving detection sensitivity.
Description
technical field [0001] The invention belongs to the technical field of optical imaging detection, and more specifically relates to a photosensitive imaging detection chip based on cutting-edge electronic fluorescence excitation and a preparation method thereof. Background technique [0002] At present, photosensitive imaging arrays, as photosensitive detectors, have been widely used in various fields. Common photosensitive imaging arrays include photon detectors and thermal detectors, and photon detectors include visible light detectors (commonly CMOS devices) and infrared detectors (commonly FPAs). Visible light detectors are mainly used in the civilian field, and the minimum detectable optical power is as low as nanowatts; infrared detectors are mainly used in the military field, and their cost is relatively high; thermal detectors are based on micro-heat absorption and photoelectric signal generation This thermal detection mode works. [0003] However, there are some te...
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IPC IPC(8): G01J1/02G01J1/42
Inventor 张新宇张汤安苏
Owner NANJING OPY ELECTRONICS TECH CO LTD