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Surface measurement system

A technology for measuring and measuring objects, which is applied in the direction of measuring devices, instruments, and optical devices, and can solve problems such as multiple reflections, low reflectivity of transparent materials, and measurement

Active Publication Date: 2019-05-24
致茂电子(苏州)有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, transparent materials have the problem of low reflectivity. To obtain a sufficiently accurate image, it is necessary to increase the exposure time and / or light source intensity of the measurement
If there is a defect inside or at the bottom of the component, it may also be measured, resulting in misjudgment of the signal
In addition, if the surface of the component is a curved surface, multiple reflections will also occur

Method used

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Embodiment Construction

[0022] A number of embodiments of the present invention will be disclosed below with the accompanying drawings. For the sake of clarity, many practical details will be described together in the following description. It should be understood, however, that these practical details should not be used to limit the invention. That is, in some embodiments of the present invention, these practical details are unnecessary. In addition, for the sake of simplifying the drawings, some known and conventional structures and elements will be shown in a simple and schematic manner in the drawings.

[0023] figure 1 It is a schematic diagram of a surface measurement system 100 according to an embodiment of the present invention. The surface measurement system 100 is used for measuring an object 900 having a low reflection surface 910 . The surface measurement system 100 includes a condensation device 110 and a measurement device 160 . The dew condensation device 110 is used to form a liqu...

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Abstract

Disclosed is a surface measurement system which is used for measuring a to-be-measured object having a surface with low reflection. The surface measurement system includes a condensation device and ameasurement device. The condensation device is used for forming a liquid layer on the surface of the to-be-measured object. The condensation device includes a cavity, a temperature control gas sourceand a humidifying gas source. The cavity is used for accommodating the to-be-measured object. The temperature control gas source is connected to the cavity and is used for providing temperature control gas to the cavity to control the temperature of the to-be-measured object. The humidifying gas source is connected to the cavity and is used for providing water vapor to the cavity to form the liquid layer on the surface of the to-be-measured object. The measurement device includes a platform, a light source and an image capturing device. The platform is used for placing the to-be-measured object with the liquid layer. The light source is used for providing a light beam to illuminate the to-be-measured object on the platform. The image capturing device is used for detecting light beams scattered from the to-be-measured object on the platform. The scattering amount of the light beam illuminating on the surface can be increased by forming the liquid layer on the surface. Therefore, imageshave a high signal-to-noise ratio, the surface can be accurately measured, and the measurement speed can be improved.

Description

technical field [0001] The invention relates to a surface measurement system. Background technique [0002] With the advancement of technology, more and more electronic products use transparent materials (such as glass) as product components (such as mobile phone panels, mobile phone casings, lenses). In order to ensure the quality, the surface topography of the transparent component can be measured through measurement. However, the transparent material has a problem of low reflectivity. To obtain a sufficiently accurate image, it is necessary to increase the measurement exposure time and / or light source intensity. If there is a defect inside or at the bottom of the component, it may also be measured, resulting in misjudgment of the signal. In addition, if the surface of the component is a curved surface, multiple reflections will also occur. Contents of the invention [0003] One aspect of the present invention provides a surface measurement system for measuring a test...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/24
Inventor 邱奕昌蔡政廷潘世耀杨兰昇郭修玮锺绍恩
Owner 致茂电子(苏州)有限公司
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