Gyroscope structure

Abstract

Disclosed is a gyroscope structure. The gyroscope structure includes a substrate, an anchor point fixed on the substrate and multiple mass blocks arranged around the anchor point and suspended on thesubstrate. The multiple mass blocks include a first mass block, a second mass block, a third mass block and a fourth mass block. The multiple mass blocks are connected to the anchor points through elastic connecting components. The first mass block and the second mass block are oppositely arranged in a first direction so as to make the first mass block and the second mass block perform a translational reciprocating motion in the first direction under power drive. The third mass block and the fourth mass block are oppositely arranged in a second direction. The first mass block and the second mass block are connected to each other through a coupling component and the third mass block and the fourth mass block are connected to each other through a coupling component so as to drive the third mass block and the fourth mass block to perform a translational reciprocating motion in the second direction when the first mass block and the second mass block perform the translational reciprocatingmotion in the first direction. The second direction and the first direction are perpendicular to each other and are in the same plane. The accuracy and sensitivity of a gyroscope are improved.

Description

technical field [0001] The invention relates to the field of micro-electromechanical technology, in particular to a gyroscope structure. Background technique [0002] The MEMS (Micro Electro Mechanical System, Micro Electro Mechanical System) gyroscope utilizes the Coriolis force (Coriolis force, also called Coriolis force) phenomenon. The Coriolis force is a description of the offset of the linear motion of a particle in a rotating system due to inertia relative to the linear motion of the rotating system. The Coriolis force comes from the inertia of the object's motion. The particle moving in a straight line in the rotating system has a tendency to continue moving along the original direction of motion due to the inertia. However, because the system itself is rotating, in the After a period of movement, the position of the particle in the system will change, and the direction of its original movement trend will deviate to a certain extent if it is observed from the perspe...

AI Technical Summary

Problems solved by technology

[0004] The performance of the gyroscope in the prior art still needs to be further improved

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