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A laser drilling and cutting system for semiconductor materials

A laser drilling and cutting system technology, applied in laser welding equipment, welding/cutting auxiliary equipment, welding/welding/cutting items, etc., can solve the problem of low precision, inconvenient semiconductor drilling, and the influence of infrared distance measuring sensor measurement accuracy and other problems, to achieve the effect of ensuring accuracy, simple structure, and convenient pick-and-place

Active Publication Date: 2021-02-26
江苏守航实业有限公司
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Problems solved by technology

[0005] A laser drilling and cutting system for semiconductor materials proposed by the present invention solves the problem that when using a laser cutting device to process semiconductors, the infrared ranging sensor is generally placed in the outside world for distance measurement, which will cause The generated waste affects the measurement accuracy of the infrared distance measuring sensor. In addition, in the prior art, the X / Y axis drives the laser cutting device to move, which is very inconvenient when drilling semiconductors, and the accuracy of drilling into a circle is also low. not high problem

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  • A laser drilling and cutting system for semiconductor materials
  • A laser drilling and cutting system for semiconductor materials
  • A laser drilling and cutting system for semiconductor materials

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Embodiment Construction

[0020] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention.

[0021] refer to Figure 1-4 , a laser drilling and cutting system for semiconductor materials, comprising a base 1, the upper side wall of the base 1 is fixedly connected with a mounting seat 2, the upper end side wall of the mounting seat 2 is fixedly connected with a multi-color warning light 22, and the multi-color warning light Lamp 22 adopts red, yellow and green. When green, it shows that the work is safe. When it is red and yellow, it shows that there is a mistake in the punching process, and reminds the workers to carry out maintenance. The multi-color warning lights 22 are electrically connected with the infrared ranging sensor 9 and the servo motor respectiv...

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Abstract

The invention belongs to the field of semiconductors, in particular to a laser drilling and cutting system for semiconductor materials, aimed at the fact that the waste spatter generated by the existing cutting affects the accuracy of the infrared distance measuring sensor, and it is inconvenient to use the X / Y axis to perform the drilling operation Problem, the following solution is now proposed, which includes a base, the upper side wall of the base is fixedly connected with a mounting seat, the mounting seat is a hollow structure, the inner wall of the mounting seat is fixedly connected with a stepping motor, and the The inner wall is rotatably connected with a ball screw that matches the output shaft of the stepping motor. The upper sliding sleeve of the ball screw is provided with a sliding block, and the upper side wall of the sliding block is fixedly connected with a light barrier. The sliding rods are fixedly connected between the side inner walls, and the measurement of the light baffle by the infrared distance measuring sensor is protected by the mounting seat, reducing the influence of the outside world, improving the accuracy of distance measurement, and the worktable is rotated through the cooperation of the worm and worm gear to complete quickly. Punch cutting.

Description

technical field [0001] The invention relates to the technical field of semiconductor processing, in particular to a laser drilling and cutting system for semiconductor materials. Background technique [0002] A semiconductor refers to a material whose conductivity at room temperature is between that of a conductor and an insulator. Semiconductors have a wide range of applications in radios, televisions, and temperature measurement. For example, a diode is a device made of a semiconductor. A semiconductor is a material whose electrical conductivity can be controlled, ranging from an insulator to a conductor. No matter from the perspective of technology or economic development, the importance of semiconductors is enormous. The core units of most of today's electronic products, such as computers, mobile phones or digital recorders, are closely related to semiconductors. Common semiconductor materials include silicon, germanium, gallium arsenide, etc., and silicon is the mos...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B23K26/38B23K26/36B23K26/70B23K37/04
CPCB23K26/36B23K26/38B23K37/04B23K26/702B23K2103/56
Inventor 魏守冲
Owner 江苏守航实业有限公司
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