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An Automatic Statistical Compensation System for PECVD Film Thickness

A technology of statistical compensation and film thickness, applied in the direction of sustainable manufacturing/processing, final product manufacturing, coating, etc., can solve the problems of difficult to obtain film thickness and high product defect rate, and achieve the effect of reducing color difference film and avoiding debris

Active Publication Date: 2022-01-18
TONGWEI SOLAR ENERGY (CHENGDU) CO LID
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to solve the problem that the film thickness in the PECVD process in the prior art is difficult to be timely and effectively monitored, resulting in a high product defect rate, and to provide a PECVD film thickness automatic statistical compensation system with higher quality finished silicon solar cells

Method used

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  • An Automatic Statistical Compensation System for PECVD Film Thickness
  • An Automatic Statistical Compensation System for PECVD Film Thickness

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0042] A PECVD film thickness automatic statistical compensation system, including PECVD furnace tube equipment, automatic loading and unloading equipment, is characterized in that it also includes an ATM system and a central control computer; the ATM system is used to collect PECVD furnace tube equipment and automatic loading and unloading equipment. The film thickness data of solar cells transmitted between them, and the collected film thickness data are transmitted to the central control computer; the central control computer is used to calculate the compensation time required for the solar cell coating process in the PECVD furnace tube equipment and The time is sent to the PECVD furnace tube equipment for process compensation.

Embodiment 2

[0044] On the basis of Embodiment 1, the ATM system includes a film thickness acquisition module and a signal transmission module, and the film thickness acquisition module collects the film thickness data of each solar cell; the signal transmission module collects the film thickness collected by the film thickness acquisition module All the thickness data are sent to the central control computer; the central control computer also includes a communication module and a data processing module. The communication module is used to collect the film thickness data transmitted by the ATM system and the manually set film thickness control center value and film thickness control line. and the control number of abnormal film thickness; the data processing module processes the collected film thickness data on the basis of the set film thickness control center value, film thickness control line and abnormal film thickness control number; the communication module then The data processed by ...

Embodiment 3

[0046] On the basis of the above embodiments, when the number of abnormal film thickness slices exceeds the control number of abnormal film thickness slices, the PECVD furnace tube equipment will not perform process time compensation.

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Abstract

The invention discloses an automatic statistical compensation system for PECVD film thickness, which belongs to the field of silicon solar cell manufacturing. It includes PECVD furnace tube equipment and automatic loading and unloading equipment, and is characterized in that it also includes an ATM system and a central control computer; the ATM system is used to collect solar cell film thickness data transported between PECVD furnace tube equipment and automatic loading and unloading equipment, And transmit the collected film thickness data to the central control computer; the central control computer is used to calculate the compensation time required for the solar cell coating process in the PECVD furnace tube equipment and send the time to the PECVD furnace tube equipment for the process compensate. The invention completes the complete monitoring of the change of the film thickness of the battery sheet by timely measuring the film thickness data, and can automatically adjust the process time, thereby improving the overall finished product quality of the solar battery sheet.

Description

technical field [0001] The invention belongs to the field of silicon solar cell manufacturing, and in particular relates to an automatic statistical compensation system for PECVD film thickness. Background technique [0002] In the production of solar cells, there is a process called PECVD process. The function of PECVD process is to deposit a layer of silicon nitride film on silicon solar cells to reduce the reflectivity of sunlight and improve the conversion efficiency of the cells. In this process, because the PECVD furnace tube equipment uses graphite boats as the carrier of the anti-oxidation layer on the cells, the graphite boat will accumulate a silicon nitride layer on the boat body as the number of times of use increases, and this silicon nitride layer will affect The electrical conductivity of the battery sheet in the graphite boat will affect the overall uniformity of the coating. If the film thickness is not effectively monitored in time, it will eventually cause...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/67H01L31/18C23C16/52
CPCY02P70/50
Inventor 戴睿哲袁桃生刘赖生冷德成潘金亮蒋梅
Owner TONGWEI SOLAR ENERGY (CHENGDU) CO LID
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