Self-balancing variable area array capacitive displacement detection device and method

Abstract

The invention discloses a self-balanced variable-area array capacitive displacement detection device and method. The device comprises a displacement detection unit, a weak signal conditioning circuit,a demodulation circuit, a low-pass circuit, a control circuit, a feedback execution machine, a feedback current vector control circuit, a carrier and demodulation wave generation circuit and a feedback detection circuit, wherein the input end of the feedback detection circuit is connected to the output end of the low-pass circuit, the first input end of the feedback current vector control circuitis connected to the output end of the control circuit, the second input end of the feedback current vector control circuit is connected to the output end of the feedback detection circuit, the inputend of the feedback execution machine is connected to the output end of the feedback current vector control circuit, the output end of the feedback execution machine is connected to the first input end of the displacement detection unit, and the second input end of the displacement detection unit is connected to the output end of the carrier and demodulation wave generation circuit. Through the detection device and method, self-diagnosis and self-correction of a balance position of a movable pole plate of a variable-area array capacitive sensor can be effectively realized.

Description

technical field [0001] The invention belongs to the technical field of MEMS sensing, and more specifically relates to a self-balancing variable-area array capacitive displacement detection device and method. Background technique [0002] MEMS (Micro Electro Mechanical Systems) sensors are sensors manufactured using microelectronic technology, which have the advantages of small size, light weight, and low energy consumption. [0003] MEMS array capacitive sensing structure is a typical "sandwich" structure. Through the packaging of the upper cover, the lower cover, and the spring oscillator diaphragm, an array capacitor structure is formed between the spring oscillator mass and the upper cover, and the movement of the oscillator mass in the direction of the sensitive axis forms a variable-area capacitor design. The change of the external detection target is converted into the relative position change of the mass block and the outer frame reference system, and the sensing fro...

AI Technical Summary

Problems solved by technology

[0007] Aiming at the defects or improvement needs of the existing MEMS array capacitive sensing structure, the present invention provides a self-balancing variable-area array capacitive displacement detection device and method, which can effectively solve the problem of self-balancing of the balance position of the array plate of the variable-area capacitive sensor. Diagnose and self-correct problems while keeping the circuit structure as simple as possible while retaining the original circuit structure

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