Detecting device of water way, equipment and method

Abstract

The invention discloses a detecting device of a water way, equipment and a method. The detecting device includes an air flow pipeline (1); one end of the air flow pipeline communicates with a water inlet of to-be-detected equipment, the other end of the air flow pipeline (1) communicates with compressed air generating equipment, and compressed air is introduced to the to-be-detected equipment by the compressed air generating equipment through the air flow pipeline (1); and a pressure regulating valve (2), a hand valve (3) and a pressure gauge (4) are sequentially arranged on the air flow pipeline (1) in the airflow direction. According to the detecting device, the compressed air with same pressure are introduced to the water way pipeline, a pressure maintaining test is conducted, thus theproblem that components are damaged in the water way pressure maintaining test process is avoided, pressure maintaining time is short, and the efficiency is high.

Description

technical field [0001] The invention belongs to the field of mechanical equipment detection, and in particular relates to a waterway detection device, equipment and method. Background technique [0002] At present, many mechanical equipments have water circuit circulation systems, especially semiconductor equipment. After the equipment is assembled, the water circuit needs to be tested with water. Most of the existing methods are to directly pass water for pressure holding test. In this way, there will be the following problems: [0003] 1. When there is a leak in the waterway of the equipment, the water sprayed on the electronic components will cause damage to the components, which will affect the cost and production cycle of the equipment, and may cause safety accidents; [0004] 2. If there is a leak in the waterway of the equipment, the leaked water not only needs to be cleaned, but also for some compact equipment, the water leakage is difficult or not cleaned; [0005...

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Problems solved by technology

[0003] 1. When there is a leak in the waterway of the equipment, the water sprayed on the electronic components will cause damage to the components, which will affect the cost and production cycle of the equipment, and may cause safety accidents;

[0004] 2. If there is a leak in the waterway of the equipment, the leaked water not only needs to be cleaned, but also for some compact equipment, the water leakage is difficult or not cleaned;

[0005] 3. Use the method of passing water to maintain the pressure of the waterway, the pressure maintaining time is too long, and the efficiency is low

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