A linear spectral confocal system for three-dimensional surface measurement

Abstract

The invention discloses a linear spectral confocal system applied to measurement of three-dimensional surface shapes. The linear spectral confocal system comprises a broad-spectrum light source, a transmission grating, a cylindrical mirror group, a light radiation treatment unit and a detector, wherein the broad-spectrum light source is used for providing light radiation with a certain wavelengthrange; the transmission grating is used for dividing light radiation emitted by a light radiation source into separated wavelengths; the cylindrical mirror group is used for focusing light radiation with different wavelengths at different heights in a normal direction on a surface of a measured object and not changing a transmission direction of radiation light; the light radiation treatment unitis used for receiving light radiation reflected by the surface of the measured object in a mirror surface reflection direction and guiding the light radiation to the detector; and the detector is usedfor receiving radiation reflected from the measured object. According to the linear spectral confocal system, the grating is used for achieving chromatic dispersion; the spectral separation can be achieved to a greater extent; a larger depth range can be measured during surface shape treatment; the cylindrical mirror group is used, so that linear detection is achieved; one-dimensional scanning can be only used when planar flatness information is obtained.

Description

technical field [0001] The present invention relates to measuring instruments and methods, especially those measuring instruments and methods for measuring the three-dimensional surface shape of objects. Background technique [0002] With the advancement of modern detection technology, three-dimensional measurement technology has gradually become the focus of people's research, especially with the development of high and new technologies such as laser technology, computer technology and image processing technology, optical three-dimensional measurement technology has been widely used. Optical three-dimensional surface measurement technology is widely used in high-speed inspection, product development, quality control and other fields due to its advantages of high precision, high efficiency and non-contact. [0003] The concept of confocal microscopy was first proposed by Minsky of the United States in 1955, who built the first confocal microscope using the confocal principle...

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Problems solved by technology

[0004] At present, most spectral confocal systems use dispersion lens groups to achieve spectral separation, but the spectral separation obtained by this dispersion method is not obvious, the measurement depth is small, and each measurement can only obtain the height information of the detection point. If necessary To obtain the 3D surface shape of the entire plane, a 2D scan is required

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