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A micromirror structure

A technology of micro-bridge structure and micro-mirror, which is applied in the direction of optical components, instruments, optics, etc., can solve the problems of limited rotation angle and direction, and cannot meet the requirements of the market, and achieve the effect of expanding the scanning range and improving the range of rotation angle

Active Publication Date: 2021-06-15
SHANGHAI INTEGRATED CIRCUIT RES & DEV CENT
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the rotation angle and direction of traditional micromirror devices are relatively limited, which is increasingly unable to meet market requirements

Method used

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  • A micromirror structure
  • A micromirror structure
  • A micromirror structure

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Embodiment Construction

[0019] The specific embodiment of the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0020] It should be noted that, in the following specific embodiments, when describing the embodiments of the present invention in detail, in order to clearly show the structure of the present invention for the convenience of description, the structures in the drawings are not drawn according to the general scale, and are drawn Partial magnification, deformation and simplification are included, therefore, it should be avoided to be interpreted as a limitation of the present invention.

[0021] In the following specific embodiments of the present invention, please refer to figure 1 , figure 1 It is a schematic diagram of a micromirror structure in a preferred embodiment of the present invention. Such as figure 1 As shown, a micromirror structure of the present invention includes a micromirror array composed of micromirror units. ...

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Abstract

The invention discloses a micromirror structure, which comprises a micromirror array composed of micromirror units. The micromirror unit is composed of a plurality of adjacently arranged microbridge structures built on a substrate. Each microbridge structure includes a connecting device. A support column on the substrate and a microbridge deck connected to the support column at a single point, a metal reflective layer is provided on the microbridge bridge surface, and the metal reflective layer is electrically connected to the substrate through the support column, and each microbridge The substrate below the bridge deck is provided with at least one metal control component that establishes an electrical connection with the substrate; when current is applied to the metal reflective layer and the corresponding metal control component, each micro-bridge deck can be controlled separately by voltage The warping direction and angle can realize the arbitrary rotation of the micromirror unit in multiple directions, so that the rotation angle range of the micromirror can be improved, and when it is applied to a laser radar, for example, the scanning range of the laser radar can be significantly expanded.

Description

technical field [0001] The invention relates to the technical field of semiconductor integrated circuits and sensors, and more particularly, to a micromirror structure that can be rotated arbitrarily. Background technique [0002] With the development of autonomous driving technology, higher and higher requirements are put forward for lidar and its micromirror technology. However, the rotation angle and direction of traditional micromirror devices are relatively limited, which is increasingly unable to meet market requirements. Contents of the invention [0003] The object of the present invention is to overcome the above-mentioned defects in the prior art and provide a micromirror structure. [0004] To achieve the above object, the technical scheme of the present invention is as follows: [0005] A kind of micromirror structure, comprises the micromirror array that is made up of micromirror unit, and described micromirror unit is made up of the microbridge structure th...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B26/08
CPCG02B26/0833
Inventor 康晓旭
Owner SHANGHAI INTEGRATED CIRCUIT RES & DEV CENT