Three-dimensional constant-force parallel flexible micro-positioning platform

Abstract

The invention discloses a three-dimensional constant-force parallel flexible micro-positioning platform. The three-dimensional constant-force parallel flexible micro-positioning platform comprises a main frame, a force input mechanism, a force output mechanism, and a constant force mechanism, wherein the force input mechanism, the force output mechanism and the constant force mechanism are arranged in the main frame. The constant force mechanism comprises a parallel plate spring mechanism, an X-direction constant force mechanism, a Y-direction constant force mechanism and a Z-direction constant force mechanism, wherein the X-direction constant force mechanism, the Y-direction constant force mechanism and the Z-direction constant force mechanism are connected with the parallel plate springmechanism and are mutually orthogonal, the X-direction constant force mechanism comprises a first negative stiffness mechanism and a first plate spring flexible structure which are in series connection, the Y-direction constant force mechanism comprises a second negative stiffness mechanism and a second plate spring flexible structure which are in series connection, and the Z-direction constant force mechanism comprises a third negative stiffness mechanism and a third plate spring flexible structure which are in series connection. The parallel structure is adopted for achieving motion decoupling, the positioning platform is provided with three independent freedom degrees in three-dimensional XYZ directions, meanwhile, a flexible hinge is used for connection, traditional connection defectsare overcome, and high-precision positioning is achieved.

Description

[0001] 【Technical field】 [0002] The invention relates to the field of micro-nano precision drive and positioning technology, in particular to a three-dimensional constant force parallel flexible micro-positioning platform based on a flexible mechanism. [0003] 【Background technique】 [0004] Micro-positioning platform technology is a research and application hotspot in modern precision engineering. At present, the micro-positioning platform has been widely used in the fields of rapid pick-and-place operation of micro-nanoscale objects, high-precision manufacturing and assembly, and microinjection of biological cells. Due to the limitations of one-dimensional and two-dimensional micro-positioning platforms with less degrees of freedom, multi-dimensional micro-positioning platforms have received widespread attention. [0005] The Chinese invention patent application with the application number 201810029943.5 discloses a serial piezoelectric-driven micro-nano platform. Its thr...

AI Technical Summary

Problems solved by technology

[0009] Therefore, the existing three-dimensional large-stroke micro-positioning platform needs to use a larger driver to achieve large-stroke output, which increases the physical size and hardware cost of the platform.

In addition, the existing constant-force micro-positioning platform can only realize constant-force micro-positioning movement in a two-dimensional plane

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