Scorpion seam receptor-based simulation flexible temperature sensor and fabrication method thereof

Abstract

The invention discloses a scorpion seam receptor-based simulation flexible temperature sensor and a fabrication method thereof. The temperature sensor comprises a flexible substrate, a crack layer, aconduction layer and a temperature measurement layer, wherein the temperature measurement layer is used for generating bending and deformation according to temperature change, a plurality of cracks are arranged on the crack layer, the conduction layer comprises a first capacitor electrode and a second capacitor electrode which are respectively arranged at two sides of the cracks, and the conduction layer is used for obtaining a temperature change value according to a capacitance change value between the first capacitor electrode and the second capacitor electrode. When the temperature of a to-be-measured object is changed slightly, the temperature measurement layer is bent and deformed, the capacitance values of the first capacitor electrode and the second capacitor electrode are changed,so that the temperature is represented by a capacitor, and temperature detection is achieved. By a crack structure, the temperature sensor has ultrahigh sensitivity, and the requirement of the temperature sensor on the sensitivity is met.

Description

technical field [0001] The invention relates to the technical field of temperature sensors, in particular to a bionic flexible temperature sensor based on scorpion seam susceptors and a preparation method thereof. Background technique [0002] With the development of science and technology, especially the development of the Internet of Things and intelligent control technology. All kinds of sensors show their unique advantages and characteristics, and are widely used in various advanced mechanical equipment and systems, playing an extremely important role. Sensors with high sensitivity and high stability have attracted people's attention. [0003] The flexible strain sensor has the characteristics of bending, stretching and shrinking, and can convert its deformation and force into electrical signals. Therefore, according to the conversion relationship between different physical quantities, the strain sensor can detect various physical quantities through simple conversion f...

AI Technical Summary

Problems solved by technology

[0006] The technical problem to be solved by the present invention is to provide a bionic flexible temperature sensor based on scorpion seam susceptors and its preparation method, aiming at solving the problem of poor sensitivity of temperature sensors in the prior art.

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