Scanning electrochemical microscope and correction method thereof

A technology of scanning electrochemistry and microscopy, applied in the field of scanning conductive probe microscopy, which can solve the problems of lack of calibration and high cost of scanning electrochemical microscopy

Active Publication Date: 2019-08-02
广东鼎诚电子科技有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the use of precision displacement detection instruments and precision standard samples requires high costs and additional devices. At present, the industry still lacks a simple and

Method used

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  • Scanning electrochemical microscope and correction method thereof
  • Scanning electrochemical microscope and correction method thereof
  • Scanning electrochemical microscope and correction method thereof

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Embodiment Construction

[0064] The present invention will be further described below in conjunction with drawings and embodiments.

[0065] see Figure 1-3 , a scanning electrochemical microscope, comprising: a three-dimensional ball screw scanner 1, a three-dimensional piezoelectric scanner 2, a conductive probe 3, a conductive substrate 4, a working platform 5 and a micro-control unit, the three-dimensional ball screw scanner 1 includes the X adjustment axis, the Y adjustment axis and the Z adjustment axis; the X adjustment axis, the Y adjustment axis and the Z adjustment axis are arranged perpendicular to each other, the X adjustment axis is set on the working platform 5, and the three-dimensional piezoelectric scanner 2 is arranged on the Z adjustment axis, the conductive probe 3 is arranged at the end of the three-dimensional piezoelectric scanner 2, the conductive substrate 4 is arranged on the working platform 5, and the position of the conductive substrate 4 and The position of the conductiv...

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Abstract

The invention discloses a scanning electrochemical microscope, which comprises a three-dimensional ball screw scanner, a three-dimensional piezoelectric scanner, a conductive probe, a conductive substrate, a working platform and a micro-control unit, and is characterized in that the three-dimensional ball screw scanner comprises an X adjusting shaft, a Y adjusting shaft and a Z adjusting shaft; every two of the X adjusting shaft, the Y adjusting shaft and the Z adjusting shaft are perpendicular to each other; the X adjusting shaft is arranged on the working platform; the three-dimensional piezoelectric scanner is arranged on the Z adjusting shaft; according to the scheme, a ball screw scanner, a piezoelectric scanner, a conductive probe, a conductive substrate and a micro-control unit which are high in stability are integrated in the scanning electrochemical microscope; the scanning range and linearity of the piezoelectric scanner are corrected through the ball screw scanner, use of aprecise distance testing instrument or a standard sample is avoided, and the advantages of being easy and convenient to operate and low in cost are achieved.

Description

technical field [0001] The invention relates to the technical field of scanning conductive probe microscopes, in particular to a scanning electrochemical microscope and a calibration method thereof. Background technique [0002] Scanning Probe Microscope (SPM) is a general term for a series of microscopes, including scanning tunneling microscope (STM), atomic force microscope (AFM), electrostatic force microscope (EFM), magnetic force microscope (MFM), scanning electrochemical microscope (SECM), Scanning Ion Conductance Microscopy (SICM), etc., the basic principle is to use the conductive probe to scan the sample to be tested, and simultaneously detect the interaction between the conductive probe and the sample during the scanning process (tunneling current, interaction Force, electrostatic force, magnetic force, electrochemical current, etc.), so as to obtain relevant information (morphology, structure, conductivity, etc.) of the surface of the sample to be tested. Compare...

Claims

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Application Information

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IPC IPC(8): G01Q60/60G01Q40/00
CPCG01Q60/60G01Q40/00
Inventor 包宇刘振邦王伟马英明
Owner 广东鼎诚电子科技有限公司
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