The invention discloses a
micrometer standard sample plate for a scanning electrochemical
microscope, a matched clamping and connecting device and a length calibration method, and belongs to the technical field of precise instrument calibration. The sample plate comprises a
monocrystalline silicon substrate, a micron-sized standard pattern structure formed on the surface of the
monocrystalline silicon substrate, and a conductive film layer covering the surface of the micron-sized standard pattern structure. And a mounting table matched with the clamping connecting device is arranged in the center of the upper surface of the base. The length calibration method comprises the following steps: installing and fixing the
micrometer standard sample plate
assembly on a sample table of the scanning electrochemical
microscope, and carrying out electric connection conduction; the X direction and the Y direction are calibrated; and correcting the
length measurement parameters of the scanning electrochemical
microscope. The micron standard sample plate provided by the invention has good
conductivity and stable geometrical morphology. The matched clamping and connecting device can realize rapid and accurate positioning of the standard sample plate on the scanning electrochemical microscope sample table. The calibration method ensures the accuracy and
traceability of the measurement value of the equipment.