The invention discloses an
optical fiber probe structure for micro-nano scale sensing and control, and belongs to the technical field of micro-
nano manufacturing and the field of micro-nano sensing and control. The
optical fiber probe is composed of a cladding, a
light guide core and a conductive core, the
light guide core is located in the center of the cladding, the probe structure comprises the
optical fiber probe, the
optical fiber probe comprises the cladding and the
light guide core in the center, the conductive core is further arranged in the cladding, the front end of the
optical fiber probe is tapered to be a sensing part, and the rear end of the
optical fiber probe is a connecting part for transmitting optical signals and electric signals. The sensing part and the conductive core and the light guide core in the sensing part are all provided with micro-nano-level tips. And the
tail end of the connecting part is simultaneously connected with a common optical
fiber and a wire for transmitting an optical
signal and an
electric signal. The probe is simple and changeable in structure and diversified in function; in combination with an atomic force
microscope, the temperature, surface
topography image and
optical image information of the sample can be obtained at the same time; meanwhile, the method can be applied to scanning electrochemical microscopes,
cell activity state monitoring, micro-nano control and thin
film material characteristic detection.