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Heater support device

A technology of supporting device and heater, which is applied to furnace heating elements, gaseous chemical plating, metal material coating process, etc., can solve the problems of heat absorption and heat dissipation, etc.

Active Publication Date: 2019-08-02
HUNG CHENG INT TECHNICAL CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] An object of the present invention is to provide a heater support device, which can solve the problem of long heat absorption and heat dissipation time required for multiple support members in the prior art to be heated and then cooled to remove the substrate, and can effectively shorten the entire heating process. operating hours to increase productivity

Method used

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Examples

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Embodiment Construction

[0036] see Figure 1~3 As shown, the heater supporting device 1 of the present invention is installed on the inner periphery of a surrounding heat insulator 11 in a vertical furnace for supporting a coil-type heating element 12 coaxial with the surrounding heat insulator 11 . The above-mentioned vertical furnace can be used for a plurality of semiconductor manufacturing processes such as diffusion and chemical vapor deposition (CVD), and the vertical furnace can heat the reaction gas inside the furnace through the above-mentioned process to make multiple wafers, etc. A thin film is formed on the surface of the substrate. The surrounding heat insulator 11 is in the shape of a circular tube, and its inner periphery is provided with a plurality of axial and spaced elongated axial grooves. The peripheral edge is radially depressed, and the cross-section of the groove is a tapered trapezoid, and its opening position has a limiting portion 131 whose width is smaller than the inner ...

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Abstract

The invention relates to a heater support device. The heater support device is mounted on an inner periphery of a surrounding insulator within a vertical furnace, and the inner periphery of the surrounding heat insulator is provided with multiple axially spaced engaging portions. The heater support device includes multiple limiting members and multiple support members, wherein the multiple limiting members are loosely engaged on the corresponding multiple engaging portions, the multiple limiting members and the multiple engaging portions are not separated, a radial space is arranged between the corresponding one of the limiting members and one of the engaging portions, the limiting members have a sufficient radial movement distance in the engaging portions, the multiple support members are respectively located at one ends of the multiple limiting members, and the multiple support members respectively have a positioning groove which is used for receiving and supporting a coil type heating assembly concentric with the surrounding insulator.

Description

technical field [0001] The present invention relates to a heater support device, and more particularly to a heater support device that prevents a plurality of support members from detaching from surrounding heat insulators during thermal expansion / contraction, and is used in a vertical furnace on semiconductor manufacturing equipment. Background technique [0002] In the diffusion process and chemical vapor deposition (CVD) process of the semiconductor process, the vertical furnace mainly uses the coil type heating element in the furnace to heat the reaction gas, and forms a thin film on multiple substrates such as wafers. Wherein, the coil-type heating assembly is supported by a plurality of axially arranged support members, and the plurality of support members are supported and positioned by the member support, and the heat insulator surrounds the member support. In the thermal expansion / contraction process of the above-mentioned structure during the thin film formation of...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H05B3/66C23C16/46
CPCH05B3/66C23C16/46
Inventor 大野昌孝林士杰
Owner HUNG CHENG INT TECHNICAL CO LTD
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