Tri-axial leveling device and application thereof

Abstract

The invention belongs to the technical field of horizontal plane regulation, and specifically relates to a tri-axial leveling device for an optical system, an optical test system, an electrical system, an electrical test system, a horizontal table of a physical experiment, and the like, which require leveling. The tri-axial leveling device comprises a base (1), an axial displacement motor (2), a motor controller (3), a platform (4), a biaxial dip angle sensor (5) and a motor controller remote controller (6). An angle change value read by the biaxial dip angle sensor is transmitted to the motorcontroller, to-be-regulated height of each support point is obtained by calculation, and the axial displacement motor is driven to realize precise regulation. Finally, angle errors of an upper surface are smaller than 0.03 degree. Compared with a conventional manual tri-axial leveling system, the tri-axial leveling device is high in response speed, is accurate in regulation, is free of personal errors, and can affectively avoid interferences of to-be-leveled equipment in a conventional manual leveling process.

Description

technical field [0001] The invention belongs to the technical field of level adjustment, and in particular relates to a three-axis leveling device applicable to optical systems requiring leveling, optical testing systems, electrical systems, electrical testing systems, and horizontal platforms for physical experiments. Background technique [0002] In optical, electrical and related tests, the horizontal plane is often used. The traditional horizontal plane mostly adopts the form of air flotation, that is, multiple air cushions filled with air are inserted between two planes. The air cushion is connected to the air pump, and the air cushion can absorb most of the air. Vibration from the ground, at the same time, it is relatively simple to adjust the level. You only need to adjust the inflation volume of each air cushion to achieve the leveling of the upper plane; For leveling, or only part of the optical, electrical and related test systems that need to be leveled, the air f...

AI Technical Summary

Problems solved by technology

Due to the viscous properties of the liquid and the effect of tension, the vacuole cannot accurately respond to the change of the inclination angle of the upper surface; and the determination of the alignment of the center of the vacuole is affected by the observer and the position of the observer, and the randomness and systematic error are very large

There is a risk of touching the equipment that needs to be leveled during the manual adjustment process, and the operation is very unfriendly

Images