Image Sensor Including Partition Patterns

An image sensor and pattern technology, applied in image communication, semiconductor devices, electric solid-state devices, etc., can solve the problems that it is difficult to fully improve the quantum efficiency and crosstalk phenomenon, and the grid pattern cannot fully guide the light, etc., to reduce the problem of light Diffraction phenomenon, realization of semi-shielding phase difference detection autofocus, and the effect of increasing horizontal width

Pending Publication Date: 2019-09-03
SK HYNIX INC
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, since the grid pattern alone cannot sufficiently guide light, it is difficult to sufficiently improve quantum efficiency and crosstalk phenomenon

Method used

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  • Image Sensor Including Partition Patterns
  • Image Sensor Including Partition Patterns
  • Image Sensor Including Partition Patterns

Examples

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Embodiment Construction

[0019] The disclosed technology can be implemented to provide an image sensor, a method of forming the image sensor, and an electronic device including the image sensor. The disclosed image sensor presents a design that allows the microlenses to be optically and physically separated from each other. The disclosed image sensors can also be used to optically and physically separate color filters. With the proposed design, a more efficient light guiding effect can be achieved, which further improves the crosstalk phenomenon and RAR (ray angle response).

[0020] In the present disclosure, advantages, features, and methods for achieving them will become more apparent after reading the following exemplary embodiments in conjunction with the accompanying drawings. Throughout this disclosure, like numerals refer to like components throughout the various drawings and embodiments of the disclosed technology.

[0021] Terms used in this specification are used to describe various embod...

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Abstract

An image sensor including partition patterns includes: a substrate; photo-sensing elements formed in the substrate, each photo-sensing element responsive to light to produce a photo-sensing electricalsignal; an antireflection layer formed over of the photo-sensing elements and structured to reduce optical reflection to facilitate optical transmission of incident light to the photo-sensing elements through the antireflection layer; color filters formed over the antireflection layer and arranged to spatially correspond to the photo-sensing elements, respectively, each color filter structured toselect a designated color in the incident light to transmit through to a corresponding photo-sensing element; and partition patterns formed over the antireflection layer and arranged to spatially correspond to the photo-sensing elements, respectively, to partition light receiving area above the photo-sensing elements into separate light receiving areas, each partition pattern surrounding a corresponding color filter to be separate from an adjacent color filter; grooves formed in upper portions of the partition patterns, and providing air gaps between the adjacent partition patterns; micro lenses formed over the partition patterns and the color filters to direct incident light to the photo-sensing elements through the color filters, respectively. The micro lenses may be separated from oneanother by the grooves.

Description

technical field [0001] The techniques and implementations disclosed in this patent document generally relate to an image sensor, a method of forming the image sensor, and an electronic device including the image sensor. Background technique [0002] Recently, with the development of information and communication technology and digitization of image information, more and more electronic devices such as digital cameras, video cameras, mobile phones, personal communication systems (PCS), game consoles, security cameras, and medical micro camera) is equipped with an image sensor. The image sensor includes a plurality of pixels, and each of the plurality of pixels includes a photodiode, a color filter, and a microlens. Typically, the plurality of pixels includes a grid pattern for optically isolating the pixels. However, since the grid pattern alone cannot sufficiently guide light, it is difficult to sufficiently improve quantum efficiency and a crosstalk phenomenon. Contents...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L27/146
CPCH01L27/14627H01L27/14625H01L27/14623H01L27/14621H01L27/1463H01L27/14645H01L27/14663H01L27/14643H01L27/14603H04N25/772
Inventor 李庚寅
Owner SK HYNIX INC
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