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Gan nanowire array photocathode based on field-assisted index doping structure

A nanowire array, exponential doping technology, applied in photo-emission cathodes, nanotechnology for materials and surface science, luminescent cathode manufacturing, etc. The effect of improving quantum efficiency, realizing collection possibility, and improving beam absorptivity

Active Publication Date: 2021-07-09
NANJING UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the process of studying the quantum efficiency of each facet of the GaN nanowire photocathode, it is found that there is still a problem: when the light is incident on the nanowire array and undergoes repeated refraction, the maximum collection of the escaped electrons after being absorbed by the nanowires
The photoelectrons on the sidewalls around the nanowires cannot achieve a good collection effect, resulting in a significantly lower quantum efficiency than the top, mainly because of the reabsorption of adjacent nanowires.

Method used

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  • Gan nanowire array photocathode based on field-assisted index doping structure
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  • Gan nanowire array photocathode based on field-assisted index doping structure

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preparation example Construction

[0015] A method for preparing a GaN nanowire array photocathode based on a field-assisted index doping structure of the present invention, such as image 3 shown, including the following steps,

[0016] Step 1, on double-sided polished sapphire Al 2 o 3 On the surface of the substrate 21, an unintentionally doped AlN buffer layer 22 is grown by an MOCVD growth process, with a thickness of about 10-200 nm;

[0017] Step 2: On the surface of the unintentionally doped AlN buffer layer obtained in step 1, use the MOCVD growth process and semiconductor p-type doping technology to grow a p-type exponentially doped GaN film as a photoemissive layer, with a thickness of 100-200nm, doped with elements Mg, the doping concentration range is 10 16 ~10 19 cm -3 , the doping concentration decreases exponentially from the rear interface to the surface, and the formula based on the exponential law is,

[0018] N(x)=N(0)exp(-Ax)

[0019] In the formula, x refers to the distance from a c...

Embodiment 1

[0031] to combine figure 1 As shown, a GaN nanowire array photocathode 2 based on a field-assisted index doping structure of the present invention is close to the transparent incident window 1, and a metal grid 3 is placed 1 mm behind the photocathode, and a voltage is applied between the two electrodes to form a uniform electric field . to combine figure 2 As shown, the GaN nanowire array photocathode of the exponentially doped structure of the present invention is a substrate 21, an unintentionally doped AlN buffer layer 22 and a p-type exponentially doped GaN nanowire array photoemissive layer 23 from bottom to top, The surfaces of the p-type nanowires are all coated with a Cs / O active layer (24). Sapphire Al polished on both sides 2 o 3 A non-intentionally doped AlN buffer layer is grown on the surface, with an epitaxial thickness of 50nm; a p-type exponentially doped GaN film is grown on the AlN buffer layer with a thickness of 150nm and the doping element is Mg usin...

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Abstract

The invention provides a GaN nanowire array photocathode based on a field-assisted index doping structure, including a transparent input window, an index doped GaN nanowire array photocathode and a metal grid; an index doped GaN nanowire array photocathode front end The surface is close to the transparent input window, and a metal grid is arranged at a predetermined distance behind the exponentially doped GaN nanowire array photocathode. The exponentially doped GaN nanowire array photocathode includes a substrate, an unintentionally doped AlN buffer layer, a p-type Exponentially doped GaN nanowire array photoemission layer and Cs / O active layer, the substrate and the transparent input window are placed close to each other, the unintentionally doped AlN buffer layer is close to the rear end of the substrate, p-type exponentially doped GaN The nanowire array photoemissive layer includes several GaN nanowires and each GaN nanowire is arranged on the back end of the unintentionally doped AlN buffer layer, the Cs / O active layer is wrapped on the surface of the GaN nanowire, and the metal grid is connected to the circuit to form a uniform power grid.

Description

technical field [0001] The invention relates to a photoelectric emission technology, in particular to a GaN nanowire array photocathode based on a field-assisted index doping structure. Background technique [0002] Negative electron affinity (NEA) GaN photocathode is used in high-density spin-polarized electron sources and ultraviolet detection due to its unique advantages such as high quantum efficiency (QE), small dark current, high polarizability, and concentrated electron emission energy. and other fields. However, the development of photocathode is limited to thin-film materials, and the quantum efficiency cannot be achieved due to the contradiction between photon absorption and electron diffusion on the thickness of the material. Nanomaterials can break through the application limitations of thin film materials. The nanowire array structure has excellent optical absorption characteristics, which greatly reduces the reflection of photons on the surface of the materia...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01J1/34H01J9/12B82Y40/00B82Y30/00
CPCB82Y30/00B82Y40/00H01J1/34H01J9/12
Inventor 居莹陆菲菲刘磊田健
Owner NANJING UNIV OF SCI & TECH