Gan nanowire array photocathode based on field-assisted index doping structure
A nanowire array, exponential doping technology, applied in photo-emission cathodes, nanotechnology for materials and surface science, luminescent cathode manufacturing, etc. The effect of improving quantum efficiency, realizing collection possibility, and improving beam absorptivity
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[0015] A method for preparing a GaN nanowire array photocathode based on a field-assisted index doping structure of the present invention, such as image 3 shown, including the following steps,
[0016] Step 1, on double-sided polished sapphire Al 2 o 3 On the surface of the substrate 21, an unintentionally doped AlN buffer layer 22 is grown by an MOCVD growth process, with a thickness of about 10-200 nm;
[0017] Step 2: On the surface of the unintentionally doped AlN buffer layer obtained in step 1, use the MOCVD growth process and semiconductor p-type doping technology to grow a p-type exponentially doped GaN film as a photoemissive layer, with a thickness of 100-200nm, doped with elements Mg, the doping concentration range is 10 16 ~10 19 cm -3 , the doping concentration decreases exponentially from the rear interface to the surface, and the formula based on the exponential law is,
[0018] N(x)=N(0)exp(-Ax)
[0019] In the formula, x refers to the distance from a c...
Embodiment 1
[0031] to combine figure 1 As shown, a GaN nanowire array photocathode 2 based on a field-assisted index doping structure of the present invention is close to the transparent incident window 1, and a metal grid 3 is placed 1 mm behind the photocathode, and a voltage is applied between the two electrodes to form a uniform electric field . to combine figure 2 As shown, the GaN nanowire array photocathode of the exponentially doped structure of the present invention is a substrate 21, an unintentionally doped AlN buffer layer 22 and a p-type exponentially doped GaN nanowire array photoemissive layer 23 from bottom to top, The surfaces of the p-type nanowires are all coated with a Cs / O active layer (24). Sapphire Al polished on both sides 2 o 3 A non-intentionally doped AlN buffer layer is grown on the surface, with an epitaxial thickness of 50nm; a p-type exponentially doped GaN film is grown on the AlN buffer layer with a thickness of 150nm and the doping element is Mg usin...
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