An unlocking key for a film box and its unlocking method

Abstract

The invention discloses a chip box unlocking key and an unlocking method thereof, belonging to the technical field of semiconductor equipment. The cassette unlocking key includes a key unlocking part and a key adjusting part, one end of the key adjusting part is connected with the key unlocking part, and the other end is connected with the driving device, and the key adjusting part includes at least one rotating mechanism for adjusting The spatial posture of the key unlocking part. The cassette unlocking key and its unlocking method can realize that the cassette unlocking key can self-adaptively adjust its spatial posture, avoiding the need to use special tooling to adjust the spatial posture of the cassette unlocking key in the prior art to allow the cassette unlocking key to be inserted into the cassette The problem in the keyhole.

Description

technical field [0001] The invention relates to the technical field of semiconductor equipment, in particular to a chip box unlocking key and an unlocking method thereof. Background technique [0002] Silicon wafer is an important material for making integrated circuits. Various semiconductor devices can be made by performing photolithography and ion implantation on silicon wafers. Chips made of silicon wafers have amazing computing power. Therefore, silicon wafers in the semiconductor field play an irreplaceable role in scientific and technological fields such as aerospace, industry, agriculture, and national defense. [0003] Silicon wafers are usually stored and protected in cassettes. Cassettes are placed on the film library, and the cassette door needs to be unlocked by the cassette unlocking device set on the cassette, and only after the cassette door is unlocked can the manipulator be able to pick and place silicon wafers in the cassette. [0004] Both the cassette ...

AI Technical Summary

Problems solved by technology

In order to realize the smooth unlocking of the film box door, in general, when the film library is integrated, special tooling is required to ensure the appropriate relative position and spatial posture from the film library plane to the film library unlocking component for positioning and unlocking, and the integration and debugging are very difficult

[0005] Moreover, in actual use, even if special tooling is used to ensure the relative position and relative posture of the cassette unlocking key, due to the manufacturing error of different cassettes of the same model and the different design dimensions between different types of cassettes, the unlocking device of the cassette It is the same cassette unlock key, so when there is a slight deviation between the cassette unlock key and the cassette keyhole, the cassette unlock key on the library cannot be inserted into the cassette door keyhole smoothly, making the unlocking failure, resulting in equipment shutdown; and The rigid jamming between the keyhole and the cassette unlocking key often occurs, resulting in the scrapping of a certain cassette door

[0006] In view of the above problems, it is urgent to design a cassette unlocking key and its unlocking method, which can solve the problem in the prior art that special tooling must be used to adjust the posture of the cassette unlocking key so that the cassette unlocking key can be inserted into the key hole of the cassette

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