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Multi-strip micro-narrowband filter array spectral imaging chip and its realization method

A narrow-band filter, spectral imaging technology, applied in spectrometry/spectrophotometry/monochromator, spectrum survey, optical radiation measurement, etc., can solve the problem of high cost, large size of spectrometer, poor stability and reliability and other problems, to achieve the effects of high integration, reduced structural volume and weight, easy implementation and mass production

Active Publication Date: 2020-11-17
XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] In order to solve the technical problems of large volume, poor stability and reliability, and high cost of existing spectrometers, the present invention provides a multi-strip micro-narrowband filter array spectral imaging chip and its implementation method

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  • Multi-strip micro-narrowband filter array spectral imaging chip and its realization method
  • Multi-strip micro-narrowband filter array spectral imaging chip and its realization method
  • Multi-strip micro-narrowband filter array spectral imaging chip and its realization method

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Embodiment Construction

[0070] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0071] The basic principle of the on-chip spectral imaging chip is to directly integrate micro-filters on the surface of the image sensor, so as to realize the function of on-chip spectral separation. Since it is fabricated directly on the surface of the image sensor, the integration level is very high.

[0072] refer to figure 1 , the spectral imaging chip includes an Invar adapter board 1 and an area array detector 2, the Invar adapter board 1 has a groove structure, and the position of the area array detector 2 corresponds to the groove;

[0073] The microlens array assembly 4, the multi-strip micro-narrowband filter spectroscopic assembly 3 and the area array detector 2 are sequentially arranged in the groove from bottom to top; the lower surface of the multi-strip micro-narrowband filter spectroscopic assembly 3 is bonded with the microle...

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Abstract

The invention relates to a spectrum imaging chip, in particular to a multi-strip micro-narrowband optical filer array spectrum imaging chip and an implementation method thereof, and aims to solve thetechnical problems of large size, poor stability and reliability and high cost in the conventional spectrum instrument. The multi-strip micro-narrowband optical filer array spectrum imaging chip is characterized by comprising an invar steel adapting plate and a area-array detector, wherein the invar steel adapting plate is provided with a groove structure; the position of the area-array detector corresponds to the groove; a micro-lens array assembly, a multi-strip micro-narrowband filtering and beam-splitting assembly and a area-array detector are arranged in the groove from bottom to top in sequence; the lower surface of the multi-strip micro-narrowband filtering beam-split assembly is bonded with the micro-lens array; and the upper surface of the multi-strip micro-narrowband filtering beam-split assembly is bonded with the area-array detector.

Description

technical field [0001] The invention relates to a spectral imaging chip, in particular to a multi-strip micro-narrowband filter array spectral imaging chip and a realization method thereof. Background technique [0002] Spectral imaging technology is to acquire spectral information while acquiring target spatial information, and perform "fingerprint identification" on substances while acquiring images, complete qualitative analysis and quantitative calculation of substances, and realize comprehensive detection and identification of target characteristics. [0003] The key technology to realize spectral imaging is spectroscopic technology. Traditional spectrometers use prisms or gratings to separate light of different wavelengths to form distinguishable spectral lines, and then use area array detectors to receive and process the light of each spectral line. Due to the light dispersion ability of the spectroscopic element and the limitation of the pixel size of the area array ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01J3/28
CPCG01J3/2823G01J2003/2826
Inventor 鱼卫星武登山郭权高博王帅胡炳樑
Owner XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI