scheelite phase dycro 4 Application in magnetoelectric sensor unit, magnetoelectric sensor unit and preparation method thereof
A magnetoelectric sensor, scheelite technology, applied in the field of sensors, can solve problems such as complex structure
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Embodiment 1
[0048] Deposit a layer of 10nm thick Au on the silicon dioxide substrate as the bottom electrode by vacuum evaporation technology;
[0049] DyCrO in the scheelite phase 4 As a target, a dielectric layer with a thickness of 200nm is formed on the lower electrode by pulsed laser deposition technology;
[0050] A layer of Au with a thickness of 10nm was deposited on the dielectric layer by vacuum evaporation technology as the upper electrode.
[0051] DyCrO in the scheelite phase of the dielectric layer in this example 4 Made by the following steps:
[0052] Dy(NO) with a purity higher than 99% 3 ) 3 and Cr(NO 3 ) 3 Mix according to the molar ratio of 1:1, and grind in the air for 30 minutes to obtain a mixture with a particle size of 200 mesh. The mixture was calcined in an air atmosphere at 600° C. for 1 hour, and the calcined product was ground for 30 minutes to obtain a powdery mixture. The mixture was calcined at 300° C. for 6 hours in a pure oxygen environment, and ...
Embodiment 2
[0060] A layer of 200nm thick Ag is deposited on the silicon dioxide substrate by magnetron sputtering technology as the lower electrode;
[0061] DyCrO in the scheelite phase 4 As a target, a dielectric layer with a thickness of 20 μm is formed on the lower electrode by pulsed laser deposition technology;
[0062] A layer of Ni with a thickness of 200nm is deposited on the dielectric layer by magnetron sputtering technology as the upper electrode.
[0063] DyCrO in the scheelite phase of the dielectric layer in this example 4 Made by the following steps:
[0064] Dy(NO) with a purity higher than 99% 3 ) 3 and Cr(NO 3 ) 3 Mix according to the molar ratio of 1:1, and grind in the air for 60 minutes to obtain a mixture with a particle size of 500 mesh. The mixture was calcined in an air atmosphere at 500° C. for 2 hours, and the calcined product was ground for 40 minutes to obtain a powdery mixture. The mixture was calcined at 350° C. for 4 hours in a pure oxygen environ...
Embodiment 3
[0067] in Al 2 o 3 Apply a layer of 10μm thick silver glue evenly on the substrate as the lower electrode;
[0068] Before the silver colloid is dry, the following steps will be used to obtain DyCrO in the scheelite phase 4 A thin sheet with a thickness of 200 μm that is polished to be smooth on both sides is used as a dielectric layer and covered on the lower electrode;
[0069] A layer of silver glue with a thickness of 10 μm was applied on the dielectric layer as the upper electrode.
[0070] DyCrO in the scheelite phase of the dielectric layer in this example 4 Made by the following steps:
[0071] Dy(NO) with a purity higher than 99% 3 ) 3 and Cr(NO 3 ) 3 Mix according to the molar ratio of 1:1, and grind in air for 2 hours to obtain a mixture with a particle size of 200 mesh. The mixture was calcined in an air atmosphere at 550° C. for 1.5 hours, and the calcined product was ground for 30 minutes to obtain a powdery mixture. The mixture was calcined at 250° C. ...
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