High-speed imaging method and system of undersampling grating scanning atomic force microscope

An atomic force microscope and raster scanning technology, applied in scanning probe microscopy, scanning probe technology, measuring devices, etc., can solve problems such as complex hardware design costs, and achieve short imaging time, high sampling efficiency, and small damage Effect

Inactive Publication Date: 2019-11-15
FUZHOU UNIV
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Problems solved by technology

However, complex hardware design and modifications to standard commercial AFMs will incur additional costs

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  • High-speed imaging method and system of undersampling grating scanning atomic force microscope
  • High-speed imaging method and system of undersampling grating scanning atomic force microscope
  • High-speed imaging method and system of undersampling grating scanning atomic force microscope

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[0033] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0034] It should be pointed out that the following detailed description is exemplary and is intended to provide further explanation to the present application. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs.

[0035] It should be noted that the terminology used here is only for describing specific implementations, and is not intended to limit the exemplary implementations according to the present application. As used herein, unless the context clearly dictates otherwise, the singular is intended to include the plural, and it should also be understood that when the terms "comprising" and / or "comprising" are used in this specification, they mean There are features, steps, operations, means, components and / or combina...

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Abstract

The invention relates to a high-speed imaging method and system of an undersampling grating scanning atomic force microscope. The high-speed imaging method comprises the following steps of firstly, designing an undersampling grating scanning mode, and accordingly generating an undersampling grating scanning pattern; secondly, constructing a corresponding measurement matrix according to the generated undersampling grating scanning pattern; and finally, re-constructing atomic force microscope image according to the measurement matrix and a compression sensing theory. By the high-speed imaging method, the atomic force microscope imaging speed can be increased.

Description

technical field [0001] The invention relates to the technical field of atomic force microscope imaging, in particular to a method and system for high-speed imaging of an undersampled raster scanning atomic force microscope. Background technique [0002] Atomic force microscopy (AFM) is playing an increasingly important role in many research objects due to its ability to perform measurements on both non-conductive and conductive samples at the nanoscale in liquid or air environments. However, when an AFM scans an image, it does AFM imaging in a conventional raster scan mode, which typically takes about 10 minutes or more to complete. Additionally, excessive contact of the probe tip with the sample can lead to probe wear and sample damage. In addition, the interaction of the probe tip with the sample can cause imaging distortion. [0003] At present, four types of feasible methods have been applied to AFM to realize high-speed imaging. In the first solution, hardware upgrad...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01Q60/24
CPCG01Q60/24
Inventor 韩国强牛弋翔吕路遥许海山邹宇
Owner FUZHOU UNIV
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