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A kind of processing method of single crystal silicon cylindrical element

A processing method, single crystal silicon technology, applied in liquid cleaning methods, cleaning methods and utensils, chemical instruments and methods, etc., can solve problems such as processing requirements and difficulties that cannot be combined with high precision and ultra-smoothness at the same time

Active Publication Date: 2021-07-06
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI +1
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  • Description
  • Claims
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Problems solved by technology

In the stage of high-precision modification, CNC polishing equipment mainly used for physical removal of small tools is currently used. It is extremely difficult to achieve a surface roughness Rq<0.5nm
Therefore, traditional processing methods cannot meet the processing requirements of high precision and ultra-smoothness at the same time.

Method used

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  • A kind of processing method of single crystal silicon cylindrical element

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Embodiment Construction

[0017] The technical solutions in the embodiments of the present invention will be clearly and systematically described below in conjunction with the drawings in the embodiments of the present invention. Apparently, the embodiments described this time are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts are within the protection scope of the present invention.

[0018] Step 1: Use the existing traditional planar processing technology for the monocrystalline silicon planar element blank, including rough grinding, fine grinding, polishing and other processes, to obtain a planar polished element with a surface shape PV value of 0.5-1λ and a roughness Rq of less than 0.3nm . The surface roughness Rq refers to the final requirements of the actual cylindrical components, so that after the single crystal silicon pla...

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Abstract

The invention relates to the field of optical ultra-smooth processing, in particular to a processing method for a single crystal silicon cylindrical element, which uses a classical polishing method to process an ultra-smooth planar element, and after ultrasonic cleaning, uses atmospheric plasma polishing equipment to form the cylindrical surface. Surface trimming, multiple iterative polishing, and finally complete the processing of cylindrical elements, which solves the problem that high precision and ultra-smooth processing cannot be considered in traditional cylindrical mirror processing.

Description

technical field [0001] The invention belongs to the field of optical ultra-smooth processing, and relates to atmospheric plasma processing cylindrical elements, in particular to a method for fast, high-precision and ultra-smooth molding of cylindrical surfaces of polished planar optical elements. Background technique [0002] Cylindrical lens is a special aspheric lens with unique optical imaging performance. High-precision cylindrical mirrors and cylindrical systems are more and more widely used in synchrotron radiation light sources, focusing systems, film camera lenses, laser printers, and laser shaping systems. Cylindrical mirrors based on single crystal silicon can form a K-B mirror grazing incidence system, which is used for beam focusing in synchrotron radiation sources, and its processing is extremely difficult. [0003] The processing method of the traditional cylindrical mirror consists of four stages: rough grinding of the cylindrical surface, fine grinding of th...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B24B1/00B08B3/12B08B3/02
CPCB08B3/02B08B3/12B24B1/00
Inventor 王哲徐学科吴令奇方媛媛宋力
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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