Aspheric element surface shape detection method, device and equipment, and readable storage medium

Abstract

An embodiment of the invention discloses an aspheric element surface shape detection method, an aspheric element surface shape detection device, aspheric element surface shape detection equipment, anda computer readable storage medium. The aspheric element surface shape detection method comprises the steps of: inputting sub-aperture detection data of an aspheric element to be detected into a surface shape distribution calculation model obtained by training a deep learning network model by utilizing a sample data set in advance, acquiring relative positions and an overlapping region of sub-apertures, and then performing sub-aperture splicing by using a sub-aperture splicing algorithm to realize surface shape detection of the aspheric element, wherein the deep learning network model comprises a cascaded deep network framework and a position calculation layer, the cascaded deep network framework estimates initial positions and position deviation values of the annular sub-apertures layerby layer, and the position calculation layer finely adjusts annular band positions of the annular sub-apertures by using a multi-level regression algorithm based on the initial positions and the position deviation values of the annular sub-apertures. The aspheric element surface shape detection method, the aspheric element surface shape detection device, the aspheric element surface shape detection equipment and the readable storage medium realize the automatic, quick and precise surface shape distribution information of each sub-aperture, and effectively reduce the surface shape detection cost of the aspheric element.

Description

technical field [0001] The embodiments of the present invention relate to the technical field of optical detection, and in particular to a method, device, equipment and computer-readable storage medium for detecting the surface shape of an aspheric element. Background technique [0002] Aspherical optical elements have incomparable good imaging quality of spherical optical devices, which can correct a variety of aberrations, improve imaging quality, and increase the working distance when used in optical systems. One or a small number of aspheric surfaces can Parts replace more spherical parts, which is conducive to the development of optical instruments towards miniaturization and portability. With the rapid development of optical ultra-precision processing technology, aspheric optical components have been widely used in aviation, aerospace, national defense and high-tech civilian fields. [0003] It can be understood that the aspheric surface detection technology is one of...

AI Technical Summary

Problems solved by technology

Among them, the adjustment error can be calculated and processed by the splicing algorithm; the system error can be removed from each sub-aperture through the system error calibration; the other two factors are mainly realized by ultra-precision positioning mechanism and ultra-precision position measurement device, resulting in the aspheric surface shape High detection cost

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