Large load-bearing piezoelectric stick-slip rotating table using asymmetric conversion hinge

Abstract

The invention provides a large load-bearing piezoelectric stick-slip rotating table using an asymmetric conversion hinge, and aims to solve the problems of complex hinge structure, small rotation range, weak bearing capacity and the like of the existing piezoelectric stick-slip rotating table. The large load-bearing piezoelectric stick-slip rotating table comprises a rotating table, a bearing, a supporting cylinder, a cylinder fixing bolt, a driving assembly fixing bolt, a driving assembly and a bottom table. The inner ring of the bearing is in interference-fit with the rotating table. The outer ring of the bearing is in interference-fit with the supporting cylinder. The driving assembly is fixedly installed on the bottom table through the driving assembly fixing bolt. The driving assemblyis in contact with the lower end of the rotating table. The supporting cylinder is fixedly installed on the bottom table through the cylinder fixing bolt. The used asymmetric conversion hinge has a central symmetric structure, and the asymmetric conversion hinge generates contraction oblique displacement to clamp the rotating table and generates torque to enable the rotating table to rotate due to uneven distribution of the hinge rigidity. The large load-bearing piezoelectric stick-slip rotating table has the characteristics of simple structure, large rotation range, high bearing capacity, high positioning accuracy and the like and has wide application prospects in the field of micro-nano precision driving and positioning.

Description

technical field [0001] The invention relates to a large load-bearing piezoelectric stick-slip rotary table adopting an asymmetric conversion hinge, which belongs to the technical field of micro-nano precision drive and positioning. Background technique [0002] With the development of science and technology, the demand for micro / nano-level driving and positioning technology in cutting-edge technology fields at home and abroad is becoming more and more urgent. Piezoelectric drive technology is one of the important technologies in the field of micro / nano-level drive positioning. Because of its small size, high positioning accuracy, large stroke, and no electromagnetic interference, it is widely used in micro-machining technology, material science, semiconductor processing, and bioengineering. And other fields have shown important scientific significance and broad application prospects. [0003] Piezoelectric rotary table is a precision drive positioning platform driven by pie...

AI Technical Summary

Problems solved by technology

[0005] In order to solve the technical problems of the existing piezoelectric stick-slip rotary table, such as complex structure, small rotation range, and weak bearing capacity, the present invention discloses a large load-bearing piezoelectric stick-slip rotary table using an asymmetric conversion hinge.

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