Slicing machine height measuring method, height measuring device and dicing machine

Abstract

The invention relates to a height measuring method for a dicing machine, a height measuring device and a dicing machine. The dicing machine includes a workbench, a workpiece carrying plate, a spindle, a height measuring device and a control system. The height measuring device is arranged on the workbench on the workpiece carrying plate Sideways to avoid the workpiece on the workpiece carrying plate; the height measuring device includes a height measuring body and a contact detection device, and the height measuring body has a height measuring surface for contacting with the scribing knife to measure the height of the scribing knife; the contact detection device and The signal connection of the control system is used to detect the contact between the scribing knife and the height measuring body, and is triggered to send a signal to the control system when the scribing knife is in contact with the height measuring body. During the scribing process of the workpiece, the scribing knife can be moved to the height measuring device at any time for height measurement, and the height of the scribing knife can be adjusted according to the height measurement result to ensure the scribing accuracy and improve the scribing efficiency. The current dicing machine cannot measure the height of the workpiece during the cutting process, which results in the inability to realize the continuity of the cutting work, which in turn causes the problem of low scribing efficiency.

Description

technical field [0001] The invention relates to a height measuring method for a dicing machine, a height measuring device and a dicing machine. Background technique [0002] The dicing machine is an important processing equipment in the field of semiconductor packaging and processing technology. At present, the grinding wheel dicing machine is widely used in the market. The high-speed rotating diamond scribing knife on the grinding wheel dicing machine will continue to wear during use. If the dicing Without adjusting the height of the knife, the cutting depth on the workpiece will gradually become shallower. In order to ensure the accuracy of the measurement results, it is necessary to detect the wear degree of the scribing knife online, and adjust the height of the spindle relative to the worktable according to the wear of the scribing knife. The height measuring device measures the height of the scribing knife through the height measuring device, and adjusts the height of...

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a method for measuring the height of a dicing machine to solve the problem that the current dicing machine cannot measure the height of the workpiece in the process of cutting the workpiece, which can not realize the continuity of the cutting work, and thus cause the problem of low scribing efficiency ; In addition, the purpose of the present invention is also to provide a kind of dicing machine height measuring device; In addition, the purpose of the present invention is also to provide a kind of dicing machine

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