Substrate transporting transmission device for horizontal vacuum coating production line

Abstract

The invention discloses a substrate transporting transmission device for a horizontal vacuum coating production line. The transporting transmission device comprises a carrier, a carrying disc and twobalanced transmission assemblies in mirror symmetry. Each balanced transmission assembly comprises a shaft seat, a swing shaft and a square guide rod which are connected in sequence. The end A of eachswing shaft is connected with the corresponding shaft seat in a non-fixed manner, and the end B of each swing shaft is mounted on the corresponding square guide rod. The shaft seats swing relative tothe square guide rods through the swing shafts, and the shaft seats of the two balanced transmission assemblies are symmetrically mounted on the two sides of the carrier. According to the substrate transporting transmission device for the horizontal vacuum coating production line, vibration of a substrate frame in the transportation process can be reduced, the substrate frame is kept horizontal continuously, and therefore steering caused by left-right asymmetry in the transportation process is avoided, a uniform-speed advancing state is reached, and the uniform-speed dust-free transportationrequirement in a vacuum coating chamber can be met.

Description

technical field [0001] The invention relates to a vacuum coating equipment, in particular to a substrate transport transmission device for a horizontal vacuum coating production line. Background technique [0002] When the horizontal vacuum coating production line performs vacuum coating, usually the substrate holder is driven forward by the friction transmission between it and the transmission wheel, so as to realize vacuum coating. Due to the extremely high environmental requirements for vacuum coating, it is necessary to ensure that the substrate moves forward at a constant speed during the coating process to avoid falling, and the vacuum coating environment should also avoid dust. [0003] When the existing horizontal vacuum coating production line is transporting the substrate, since the substrate rack lies on the drive wheel, the corresponding drive wheel may not be on the same horizontal plane in the strict sense, or the substrate rack is not horizontal, so the substr...

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Problems solved by technology

[0003] When the existing horizontal vacuum coating production line is transporting the substrate, since the substrate rack lies on the drive wheel, the corresponding drive wheel may not be on the same horizontal plane in the strict sense, or the substrate rack is not horizontal, so the substrate rack and the The transmission wheels may only rely on three-point contact, resulting in different total friction coefficients and different forces on both sides of the substrate holder. The substrate holder will "turn" when it is conveyed, so it cannot move forward at a uniform speed, resulting in uneven coating. In severe cases The substrate holder will also fall off the drive wheels

[0004] Setting the baffle on the outside of the transmission wheel will produce resistance to the "turning" substrate rack. Because the contact area between the two sides of the substrate rack and the baffle is different, the resistance is different, and the substrate rack will appear "swinging forward" during the transmission process. In the case of ", the collision may generate dust, and the "swing forward" cannot guarantee a uniform speed

[0005] The gear components can move at a constant speed, but lubricating oil needs to be applied between the gear components. Vacuum coating needs to be carried out under extremely dry and clean conditions, and lubricating oil cannot be used, so the gear components cannot be used for vacuum coating

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