A kind of mocvd heater source that is easy to install heater sheet and using method thereof
A heating chip and heater technology, applied in chemical instruments and methods, single crystal growth, polycrystalline material growth, etc., can solve the inconvenient installation of end caps, reduce the practicability of MOCVD heater sources, and inconvenient disk heating chips Main body maintenance and other issues
Active Publication Date: 2021-05-25
江苏实为半导体科技有限公司
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Problems solved by technology
[0003] The currently used MOCVD heater source has certain defects. It lacks the convenient installation function of the disc, which makes it inconvenient to maintain the disc and the main body of the heating plate, thereby reducing the service life of the main body of the heating plate and lacking the fastening function of the main body of the heating plate. Generally, the main body of the heating plate is fixedly installed on the disc, and it is inconvenient to replace the main body of the heating plate, thereby reducing the practicability of the MOCVD heater source. At the same time, the lack of a connecting mechanism makes it inconvenient to install the end cover on the cylinder, reducing the Protective effect on the main body of the heater
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[0034]In order to make the purpose, features and advantages of the present invention more obvious and understandable, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the following The described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0035] The technical solutions of the present invention will be further described below in conjunction with the accompanying drawings and through specific implementation methods.
[0036] In the description of the present invention, it should be understood that the orientations or positional relationships indicated by the terms "upper", "l...
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The invention discloses an MOCVD heater source which is convenient for installing a heating sheet and a method for using the same. , rotating pin, magnetic block 1, magnetic block 2, bearing, fixed rod 1, rotating plate, spring 1, pressure plate, fixed rod 2, T-shaped bar, spring 2, limit block, storage slot 1, magnetic square, fixed pin , Resetting coil spring two, bolts, nuts, storage slot two, limit slot two, spring three and clamping blocks. In the present invention, the disk is installed inside the cylinder, so that the elliptical rod is installed inside the elliptical hole on the disk, and the elliptical block is rotated in the opposite direction, so that the rotation of the rotating pin drives the first magnetic block to separate from the second magnetic block, and the elastic force of the reset coil spring Under the action of the ellipse, the elliptical block rotates back to its original position and fits the disc, and then completes the installation of the disc. The bolt moves to squeeze the block, the block is squeezed and moves, and the block moves into the second limit groove, and then the End caps are mounted on the cylinder.
Description
technical field [0001] The invention relates to an MOCVD heater source, in particular to an MOCVD heater source which is convenient for installing a heating plate and a method for using the same, belonging to the technical field of MOCVD heaters. Background technique [0002] MOCVD uses organic compounds of group III and group II elements and hydrides of group V and group VI elements as crystal growth source materials, and performs vapor phase epitaxy on the substrate in a thermal decomposition reaction mode to grow various main group III-V, Thin-layer single-crystal materials of II-VI subgroup compound semiconductors and their multiple solid solutions. [0003] The currently used MOCVD heater source has certain defects. It lacks the convenient installation function of the disc, which makes it inconvenient to maintain the disc and the main body of the heating plate, thereby reducing the service life of the main body of the heating plate and lacking the fastening function of ...
Claims
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IPC IPC(8): C30B25/10C30B29/40C30B29/48
CPCC30B25/10C30B29/40C30B29/48
Inventor 黎静陈景升田青林
Owner 江苏实为半导体科技有限公司