Vertical graphene based stretchable stress sensor and its application
A tensile stress and graphene technology, applied in the field of tensile stress sensor, can solve the problems of low sensitivity, low crack density, inability to distinguish timbre, etc., and achieve the effect of low cost
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Embodiment 1
[0046] A stretchable stress sensor based on vertical graphene, such as figure 1 As shown, including vertical graphene 1 and extraction electrode 2.
[0047] Wherein, the vertical graphene includes a bottom plane layer and a vertical layer, with a total thickness of 100 nanometers to 100 microns, preferably a total thickness in the range of 500 nanometers to 20 microns. Vertical graphene also contains high-density network cracks, such as figure 2 As shown, the crack direction includes horizontal, vertical and oblique, that is to say, it contains cracks in any direction. Multiple cracks are distributed in a staggered manner, and the network cracks divide the vertical graphene into multiple small pieces, and the adjacent small pieces are electrically connected through vertical layers; in the stretched state, the cracks become wider, but still able to Through the vertical layer bridging, the two sides of the crack are still electrically connected, and the sensor remains effecti...
Embodiment 2
[0063] A kind of stretchable stress sensor based on vertical graphene, other structures are identical with embodiment 1, difference is: as Figure 4 As shown, a stretchable substrate 3 and a stretchable protective layer 4 are also included.
[0064] The preparation process of the stretchable stress sensor based on vertical graphene includes the following steps: first prepare vertical graphene 1 on a growth substrate such as Si and Ni substrates, and then pour stretchable materials (such as PDMS) on The vertical graphene is solidified as a stretchable substrate 3, and then ultrasonically dissociated in an ultrasonic pool, thus forming a double-layer stretchable device of the stretchable substrate 3 / vertical graphene 1, and then The extraction electrode 2 is prepared on the side of the vertical graphene 1 of the stretchable substrate 3 / vertical graphene 1 double-layer stretchable device, and finally the stretchable protective layer 4 is prepared.
[0065] It should be noted tha...
Embodiment 3
[0075] A stretchable stress sensor based on vertical graphene, comprising vertical graphene, extraction electrodes, and a stretchable substrate.
[0076] Its preparation process is as follows: first Si is prepared 1 micron thick vertical graphene by CVD method on the growth substrate, then the mixture of PDMS prepolymer and curing agent is poured on the vertical graphene and solidified as a stretchable graphene. substrate, and put it into an ultrasonic pool for ultrasonic dissociation (ultrasonic frequency is 40kHz, power is 40W), so that a double-layer stretchable device of stretchable substrate / vertical graphene is formed, and then stretchable On the vertical graphene side of the substrate / vertical graphene double-layer stretchable device, Cu was prepared as the extraction electrode and fixed with conductive silver paste.
[0077] Vertical graphene contains high-density network cracks, and the crack directions include horizontal, vertical and oblique directions, that is, the...
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