Large-size silicon wafer packaging device and application method thereof
A large-size, silicon wafer technology, applied in the field of packaging devices for large-size silicon wafers, can solve the problems of too simple packaging materials and packaging methods, unsuitable for large-size silicon wafer packaging, and difficult to pick and place, and to ensure integrity and reliability. Reliability, simple structure, not easy to loosen
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[0023] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0024] The present invention proposes a packaging device for large-size silicon wafers, such as figure 1 As shown, the silicon wafer placed in this embodiment is a square silicon wafer, the side length of the silicon wafer is 180-220 mm, and the thickness is 150-200 μm, and the silicon wafer is vertically placed in the packaging device. Specifically, the packaging device includes a lower casing 10 and an upper casing 20 separately arranged, the lower casing 10 is provided with a lower cavity 11 with the opening facing upward, and the upper casing 20 is provided with an upper cavity 21 with the opening facing downward. , the lower cavity 11 and the upper cavity 21 are arranged symmetrically with respect to the middle of the lower casing 10 and the upper casing 20 respectively, the lower cavity 11 and the upper cavity 21 are arranged in alignme...
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