Automatic steel cylinder cleaning device and operation step thereof

A steel cylinder and cleaning technology, applied in the field of automatic cylinder cleaning devices, can solve the problems of wasting manpower and material resources, inconvenient to use, etc., and achieve the effects of convenient and quick use, improved production efficiency, and simple structure

Active Publication Date: 2020-02-04
JIANGSU ZHONGHONG MACHINERY MFG
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The steel cylinder for storing electronic gas is also one of the important factors affecting the purity of electronic gas, so it is necessary to clean the inside of the cylinder before storing the electronic gas; the cleaning o

Method used

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  • Automatic steel cylinder cleaning device and operation step thereof

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Embodiment Construction

[0026] Depend on figure 1 It is known that a steel cylinder automatic cleaning system device includes a vacuum oven 1, a vacuum unit 2, a replacement gas supply assembly 3, a vent valve 4, a main pipe 5, and a system control cabinet 6; the system control cabinet 6 is provided with a control panel, through The control panel sends work instructions to the PLC controller installed in it, and the PLC controller controls the vacuum oven 1, the vacuum unit 2, the replacement gas supply component 3, and the vent valve 4 to work; one end of the main pipe 5 runs through the top of the vacuum oven 1 and enters Inside the vacuum oven 1, the other end of the main pipe 5 communicates with the output end of the replacement gas supply assembly 3; the main pipe 5 is also provided with an inflation valve 7 for controlling the communication state at the communication place with the replacement air supply assembly 3; the vacuum unit 2 Comprising backing vacuum pump 21, Roots vacuum pump 22 and m...

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Abstract

The invention relates to an automatic steel cylinder cleaning system device. The automatic steel cylinder cleaning system device comprises a vacuum oven, a vacuum unit, a replacement gas supply assembly, an emptying valve, a main pipe and a system control cabinet. One end of the main pipe penetrates through the top of the vacuum oven to enter the interior of the vacuum oven. The other end of the main pipe communicates with the output end of the replacement gas supply assembly. An inflation valve for controlling the communication state is arranged at a position where the main pipe communicateswith the replacement gas supply assembly. The vacuum unit comprises a front-stage vacuum pump, a Roots vacuum pump and a molecular pump. An air inlet of the front-stage vacuum pump communicates with an exhaust port of the Roots vacuum pump. An air inlet of the Roots vacuum pump communicates with the main pipe through a first pipeline. A rough suction pipeline valve is arranged on the first pipeline. An air suction port of the molecular pump communicates with the main pipe through a second pipeline. A vacuum valve is arranged on the second pipeline. An exhaust port of the molecular pump communicates with the first pipeline through a third pipeline, wherein the first pipeline communicates with the air inlet of the Roots vacuum pump. A front-stage pipeline valve is arranged on the third pipeline. The emptying valve is arranged on the main pipe. The automatic steel cylinder cleaning system device is simple in structure and convenient to use.

Description

technical field [0001] The invention relates to the technical field of steel cylinder cleaning, in particular to an automatic cleaning device for steel cylinders and its operating steps. Background technique [0002] The gases used in the semiconductor industry are collectively referred to as electronic gases. According to its category, it can be divided into three categories: pure gas, high-purity gas and semiconductor special material gas. Special material gases are mainly used in epitaxy, doping and etching processes; high-purity gases are mainly used as diluent gases and carrier gases. Electronic gases are an important branch of specialty gases. Electronic gas can be divided into electronic grade, LSI (large scale integration) grade, VLSI (very large scale integration) grade and ULSI (ultra large scale integration) grade according to the purity grade and usage occasion. The steel cylinder for storing electronic gas is also one of the important factors affecting the pu...

Claims

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Application Information

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IPC IPC(8): B08B9/08
CPCB08B9/083B08B9/0804B08B2209/08
Inventor 潘云俊
Owner JIANGSU ZHONGHONG MACHINERY MFG
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